رسالة جامعية
Implementation of Solid Parallel-Plate Press and It's Applications
| العنوان: | Implementation of Solid Parallel-Plate Press and It's Applications |
|---|---|
| العنوان البديل: | 自製平板式直壓印機與其應用 |
| المؤلفون: | Yu-Bo Lin, 林裕博 |
| مرشدي الرسالة: | Tsung-Hsun Yang, 楊宗勳 |
| سنة النشر: | 2010 |
| المجموعة: | National Digital Library of Theses and Dissertations in Taiwan |
| الوصف: | 98 Nanoimprint lithography (NIL) is a high-resolution, speedy throughput and low cost parallel method in which surface patterns of a stamp is transferred into the material by the external force applied. In this research, the key concept of NIL method was used to fabricate micro/nano component in nanotechnology with the designed and implementation of self-made solid parallel-plate press (SPP) machine. Within this work, the fabricating process is performed using a polydimethylsiloxane (PDMS) stamp and sol-gels materials with control the experimental parameters as pressure or temperature. The process is carried out inside the imprint device and a micro/nano grating structure was made. Additionally, the dependence of the characteristic size of the device on the imprint parameters was analyzed. Furthermore, the experiment also successfully imprints high refractive index line structure on glass substrate. |
| Original Identifier: | 098NCU05614025 |
| نوع الوثيقة: | 學位論文 ; thesis |
| وصف الملف: | 83 |
| الإتاحة: | http://ndltd.ncl.edu.tw/handle/23938199440851869235Test |
| رقم الانضمام: | edsndl.TW.098NCU05614025 |
| قاعدة البيانات: | Networked Digital Library of Theses & Dissertations |
| الوصف غير متاح. |