دورية أكاديمية
Development of surface shape measuring machine of large optics by sequential three-point method Effect of error motion of scanning table on measuring accuracy
| العنوان: | Development of surface shape measuring machine of large optics by sequential three-point method Effect of error motion of scanning table on measuring accuracy / 逐次3点法による大型光学素子の形状測定機の開発 |
|---|---|
| المؤلفون: | Ryosuke Imura, Shoichi Shimada, Tomoyuki Tamagawa, Yutaka Uda, 井村 諒介, 宇田 豊, 島田 尚一, 玉川 智之 |
| المصدر: | Proceedings of JSPE Semestrial Meeting. 2014, :823 |
| قاعدة البيانات: | J-STAGE |
| DOI: | 10.11522/pscjspe.2014A.0_823 |
|---|