دورية أكاديمية

Treatment of Semiconductor Wastewater Containing Tetramethylammonium Hydroxide (TMAH) Using Nanofiltration, Reverse Osmosis, and Membrane Capacitive Deionization

التفاصيل البيبلوغرافية
العنوان: Treatment of Semiconductor Wastewater Containing Tetramethylammonium Hydroxide (TMAH) Using Nanofiltration, Reverse Osmosis, and Membrane Capacitive Deionization
المؤلفون: Juyoung Lee, Song Lee, Yongjun Choi, Sangho Lee
المصدر: Membranes; Volume 13; Issue 3; Pages: 336
بيانات النشر: Multidisciplinary Digital Publishing Institute
سنة النشر: 2023
المجموعة: MDPI Open Access Publishing
مصطلحات موضوعية: membrane capacitive deionization (MCDI), semiconductor wastewater, tetramethylammonium hydroxide (TMAH), reverse osmosis (RO), nanofiltration (NF)
الوصف: As the semiconductor industry has grown tremendously over the last decades, its environmental impact has become a growing concern, including the withdrawal of fresh water and the generation of harmful wastewater. Tetramethylammonium hydroxide (TMAH), one of the toxic compounds inevitably found in semiconductor wastewater, should be removed before the wastewater is discharged. However, there are few affordable technologies available to remove TMAH from semiconductor wastewater. Therefore, the objective of this study was to compare different treatment options, such as Membrane Capacitive Deionization (MCDI), Reverse Osmosis (RO), and Nanofiltration (NF), for the treatment of semiconductor wastewater containing TMAH. A series of bench-scale experimental setups were conducted to investigate the removal efficiencies of TMAH, TDS, and TOC. The results confirmed that the MCDI process showed its great ability as well as RO to remove them, while the NF could not make a sufficient removal under identical recovery conditions. MCDI showed higher removals of monovalent ions, including TMA+, than divalent ions. Moreover, the removal of TMA+ by MCDI was higher under the basic solution than under both neutral and acidic conditions. These results were the first to demonstrate that MCDI has significant potential for treating semiconductor wastewater that contains TMAH.
نوع الوثيقة: text
وصف الملف: application/pdf
اللغة: English
العلاقة: https://dx.doi.org/10.3390/membranes13030336Test
DOI: 10.3390/membranes13030336
الإتاحة: https://doi.org/10.3390/membranes13030336Test
حقوق: https://creativecommons.org/licenses/by/4.0Test/
رقم الانضمام: edsbas.DFFD1006
قاعدة البيانات: BASE