مؤتمر
A new miniature magnetometer based on a quartz MEMS Resonator and a Stack of Magnetic Materials
| العنوان: | A new miniature magnetometer based on a quartz MEMS Resonator and a Stack of Magnetic Materials |
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| المؤلفون: | Mauc, Charles, Perrier, Thomas, Levy, Raphael, Moulin, Johan |
| المساهمون: | DPHY, ONERA, Université Paris Saclay Châtillon, ONERA-Université Paris-Saclay, Centre de Nanosciences et de Nanotechnologies (C2N), Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), IEEE |
| المصدر: | IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS 2022) ; https://hal.science/hal-04102763Test ; IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS 2022), IEEE, Jan 2022, Tokyo, Japan. pp.955-958, ⟨10.1109/MEMS51670.2022.9699574⟩ |
| بيانات النشر: | HAL CCSD IEEE |
| سنة النشر: | 2022 |
| مصطلحات موضوعية: | Magnetometers, Microelectromechanical devices, Resonators, Magnetometer, MEMS, quartz, DETF, exchange bias, Magnetic materials, MATERIEL, MAGNETIQUE, MAGNETOMETRE, MICROELECTROMECANIQUE, RESONATEUR, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det] |
| جغرافية الموضوع: | Tokyo, Japan |
| الوصف: | International audience ; This paper presents an innovative 1D MEMS resonating magnetometer exploiting the torque induced by the external magnetic field on a stack of ferromagnetic and antiferromagnetic materials. It is targeted for applications such as magneto-inertial navigation. The sensor was successfully fabricated using a wet chemical process and its working principle was proven correct. The experimental results showed a sensitivity of 1500 Hz/T and an estimated resolution of 7.3 nT. |
| نوع الوثيقة: | conference object |
| اللغة: | English |
| العلاقة: | hal-04102763; https://hal.science/hal-04102763Test; https://hal.science/hal-04102763/documentTest; https://hal.science/hal-04102763/file/DPHY22149.1683731976.pdfTest |
| DOI: | 10.1109/MEMS51670.2022.9699574 |
| الإتاحة: | https://doi.org/10.1109/MEMS51670.2022.9699574Test https://hal.science/hal-04102763Test https://hal.science/hal-04102763/documentTest https://hal.science/hal-04102763/file/DPHY22149.1683731976.pdfTest |
| حقوق: | info:eu-repo/semantics/OpenAccess |
| رقم الانضمام: | edsbas.CC76D743 |
| قاعدة البيانات: | BASE |
| DOI: | 10.1109/MEMS51670.2022.9699574 |
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