دورية أكاديمية
JMEMS Letters.1pt Characterization of a Temperature-Sensitive Nano Piezoelectric Mechanical Resonator With a 20nm Free-Standing Hf$_{0.5}$Zr$_{0.5}$O$_{2}$ Membrane
| العنوان: | JMEMS Letters.1pt Characterization of a Temperature-Sensitive Nano Piezoelectric Mechanical Resonator With a 20nm Free-Standing Hf$_{0.5}$Zr$_{0.5}$O$_{2}$ Membrane |
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| المؤلفون: | Zhang, Jingyi, Lyu, Haoqi, Yang, Wuhao, Zhong, Hai, Liu, Zhuohui, Bie, Xiaorui, Xiong, Xingyin, Wang, Zheng, Ge, Chen, Zou, Xudong |
| المساهمون: | National Key Research and Development Program of China, Key Research Program of Frontier Science, Chinese Academy of Sciences, National Natural Science Foundation of China |
| المصدر: | Journal of Microelectromechanical Systems ; page 1-3 ; ISSN 1057-7157 1941-0158 |
| بيانات النشر: | Institute of Electrical and Electronics Engineers (IEEE) |
| سنة النشر: | 2024 |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | unknown |
| DOI: | 10.1109/jmems.2024.3392402 |
| الإتاحة: | https://doi.org/10.1109/jmems.2024.3392402Test http://xplorestaging.ieee.org/ielx7/84/4357932/10518199.pdf?arnumber=10518199Test |
| حقوق: | https://ieeexplore.ieee.org/Xplorehelp/downloads/license-information/IEEE.htmlTest ; https://doi.org/10.15223/policy-029Test ; https://doi.org/10.15223/policy-037Test |
| رقم الانضمام: | edsbas.3965DA43 |
| قاعدة البيانات: | BASE |
| DOI: | 10.1109/jmems.2024.3392402 |
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