دورية أكاديمية
Anisotropies in magnetron sputtered carbon nitride thin films
| العنوان: | Anisotropies in magnetron sputtered carbon nitride thin films |
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| المؤلفون: | Hellgren, Niklas, Johansson, Mats P., Broitman, Esteban, Hultman, Lars, Sundgren, Jan Eric |
| المصدر: | Educator Scholarship & Departmental Newsletters |
| بيانات النشر: | Mosaic |
| سنة النشر: | 2001 |
| المجموعة: | Messiah College: MOSAIC (Messiah's Open Scholarship And Intellectual Creativity) |
| مصطلحات موضوعية: | Radiowave and microwave technology, Elastic modulus, Surface acoustic waves, Thin films, Inorganic compounds, Nano-indentation, Crystal structure, Electron microscopy, Magnetron sputtering, Messiah College, Messiah University, Engineering |
| الوصف: | Carbon nitride CNx (O≤x≤0.35) thin films, deposited by reactive dc magnetron sputtering in Ar/N2 discharges have been studied with respect to microstructure using electron microscopy, and elastic modulus using nanoindentation and surface acoustic wave analyses. For growth temperature of 100°C, the films were amorphous, and with an isotropic Young's modulus of ∼170-200 GPa essentially unaffected by the nitrogen fraction. The films grown at elevated temperatures (350-550°C) show anisotropic mechanical properties due to a textured microstructure with standing basal planes, as observed from measuring the Young's modulus in different directions. The modulus measured in the plane of the film was ∼60-80 GPa, while in the vertical direction the modulus increased considerably from ∼25 to ∼200 GPa as the nitrogen content was increased above ∼15 at. %. © 2001 American Institute of Physics. |
| نوع الوثيقة: | text |
| اللغة: | unknown |
| العلاقة: | https://mosaic.messiah.edu/mps_ed/117Test; https://doi.org/10.1063/1.1369388Test |
| DOI: | 10.1063/1.1369388 |
| الإتاحة: | https://doi.org/10.1063/1.1369388Test https://mosaic.messiah.edu/mps_ed/117Test |
| رقم الانضمام: | edsbas.32FC45C0 |
| قاعدة البيانات: | BASE |
| DOI: | 10.1063/1.1369388 |
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