التفاصيل البيبلوغرافية
| العنوان: |
Growth dynamics of nanocolumnar thin films deposited by magnetron sputtering at oblique angles |
| المؤلفون: |
Alvarez, R, Garcia-Valenzuela, A, Regodon, G, Ferrer, F J, Rico, V, Garcia-Martin, J M, Gonzalez-Elipe, A R, Palmero, A |
| المساهمون: |
Junta de Andalucía, MCIN/AEI, Universidad de Sevilla, H2020 |
| المصدر: |
Nanotechnology ; volume 35, issue 9, page 095705 ; ISSN 0957-4484 1361-6528 |
| بيانات النشر: |
IOP Publishing |
| سنة النشر: |
2023 |
| الوصف: |
The morphology of numerous nanocolumnar thin films deposited by the magnetron sputtering technique at oblique geometries and at relatively low temperatures has been analyzed for materials as different as Au, Pt, Ti, Cr, TiO 2 , Al, HfN, Mo, V, WO 3 and W. Despite similar deposition conditions, two characteristic nanostructures have been identified depending on the material: a first one defined by highly tilted and symmetric nanocolumnar structures with a relatively high film density, and a second one characterized by rather vertical and asymmetric nanocolumns, with a much lower film density. With the help of a model, the two characteristic nanostructures have been linked to different growth dynamics and, specifically, to different surface relaxation mechanisms upon the incorporation of gaseous species with kinetic energies above the surface binding energy. Moreover, in the case of Ti, a smooth structural transition between the two types of growths has been found when varying the value of the power used to maintain the plasma discharge. Based on these results, the existence of different surface relaxation mechanisms is proposed, which quantitatively explains numerous experimental results under the same conceptual framework. |
| نوع الوثيقة: |
article in journal/newspaper |
| اللغة: |
unknown |
| DOI: |
10.1088/1361-6528/ad113d |
| DOI: |
10.1088/1361-6528/ad113d/pdf |
| الإتاحة: |
https://doi.org/10.1088/1361-6528/ad113dTest |
| حقوق: |
http://creativecommons.org/licenses/by/4.0Test/ ; https://iopscience.iop.org/info/page/text-and-data-miningTest |
| رقم الانضمام: |
edsbas.2438C822 |
| قاعدة البيانات: |
BASE |
