A hybrid finite volume–finite element method which can avoid overestimation of volume shared by each vertex in the meshing grid is proposed to solve the diffusive transport governed continuity equation. The simulation results demonstrate that the improved algorithm can eliminate unphysical distortions as compared to the conventional Scharfetter Gummel method. Based on the proposed algorithm, a parallel-computation simulator is developed for large-scale electrothermal simulation of resistive random access memory (RRAM) arrays, in which the domain decomposition method and J parallel adaptive unstructured mesh applications infrastructure are adopted. The validity, speedup, and scalability of the parallel simulator are investigated on the TianHe-2 supercomputer. Based on the simulated results, the electrothermal characteristics and reliability analysis of large-scale RRAM arrays are investigated in detail.
