Quantitative behavior of non-equilibrium excitation by direct electron impact in low-temperature dry reforming of methane was investigated by integrated studies of experimental validation and kinetic modeling. A plasma chemistry kinetic mechanism incorporating the reactions involving vibrational excitation of CH4, CO2, H2 and CO molecules as well as the low temperature He/CH4/CO2 conversion pathways was developed and validated. The calculation results showed that at lower E/N values (