Interferometric, absolute sensor of angular micro-displacement

التفاصيل البيبلوغرافية
العنوان: Interferometric, absolute sensor of angular micro-displacement
المؤلفون: Marek Dobosz, Michał Jankowski
المصدر: Precision Engineering. 72:250-258
بيانات النشر: Elsevier BV, 2021.
سنة النشر: 2021
مصطلحات موضوعية: 010302 applied physics, Physics, business.industry, Astrophysics::Instrumentation and Methods for Astrophysics, General Engineering, Interference (wave propagation), 01 natural sciences, Displacement (vector), Metrology, 010309 optics, Interferometry, Optics, 0103 physical sciences, Range (statistics), Measurement uncertainty, Constant (mathematics), business, Laser beams
الوصف: A design of a new, absolute sensor for measurement of an angular micro-displacement is presented. In this sensor deflections of incident laser beam generate changes of the constant of the interference fringes that are created by the double arm special interferometer. Fringe constant is determined using a CCD camera and proposed analysis algorithms. Sensor's operating principle and metrological properties are presented. Sensor was tested using reference interferometer. Obtained measurement uncertainty is equal to ±10 μrad in the multi-milliradian range. The concept of a two-sensor system for increasing twice the measuring range is presented.
تدمد: 0141-6359
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::2bea5f33a841e40475b7b1c09a276066Test
https://doi.org/10.1016/j.precisioneng.2021.04.018Test
حقوق: CLOSED
رقم الانضمام: edsair.doi...........2bea5f33a841e40475b7b1c09a276066
قاعدة البيانات: OpenAIRE