دورية
Thermal deformation measurement of Al2O3 ceramic substrate based on radial basis function
| العنوان: | Thermal deformation measurement of Al2O3 ceramic substrate based on radial basis function |
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| المؤلفون: | Shao, Jianda, Jitsuno, Takahisa, Rudolph, Wolfgang, Wang, Linlin, Tang, Chen, Ma, YuHui, Li, XiYuan |
| المصدر: | Proceedings of SPIE; July 2019, Vol. 11063 Issue: 1 p110630U-110630U-7, 995678p |
| قاعدة البيانات: | Supplemental Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.2537449 |