التفاصيل البيبلوغرافية
| العنوان: |
Computer simulation of sputter broadening due to ion bombardment in Au--Ag thin film couple depth profiling. |
| المؤلفون: |
Schwarzmann, I.L., Goldiner, M.G., Plakhotnikov, O.I. |
| المصدر: |
International Journal of Electronics; Nov92, Vol. 73 Issue 5, p977, 3p |
| مصطلحات موضوعية: |
GOLD films, THIN films, ION pumps |
| مستخلص: |
Atomic mixing of gold (5 and 10 monolayers) thin films on silver substrates during sputter depth profiling with 1-3 keV argon ions at angles of incidence 0°, 15°, 30°, 45° has been studied by computer simulation. Binary collision approximations have been applied. The original step-like profile is broadened asymmetrically by ion bombardment and the 0-5 concentration plane is shifted towards the inside of the sample. [ABSTRACT FROM AUTHOR] |
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| قاعدة البيانات: |
Complementary Index |
