دورية أكاديمية

Crystallographic orientation dependence of compositional transition and valence band offset at SiO2/Si interface formed using oxygen radicals.

التفاصيل البيبلوغرافية
العنوان: Crystallographic orientation dependence of compositional transition and valence band offset at SiO2/Si interface formed using oxygen radicals.
المؤلفون: Suwa, T., Teramoto, A., Kumagai, Y., Abe, K., Li, X., Nakao, Y., Yamamoto, M., Kato, Y., Muro, T., Kinoshita, T., Ohmi, T., Hattori, T.
المصدر: Applied Physics Letters; 4/26/2010, Vol. 96 Issue 17, p173103, 3p, 1 Chart, 4 Graphs
مصطلحات موضوعية: ELECTRONIC structure, VALENCE (Chemistry), VALENCE fluctuations, SILICON oxide films, REACTIVE oxygen species
مستخلص: The chemical and electronic-band structures of SiO2/Si interfaces formed utilizing oxygen radicals were investigated by measuring angle-resolved photoelectron spectra arising from Si 2p and O 1s core levels and a valence band with the same probing depth. We clarified that (1) the SiO2/Si interfaces formed exhibited an almost abrupt compositional transition, (2) the valence band offsets at the Si(111)/Si, Si(110)/Si, and Si(551)/Si interfaces are almost the same and are 0.07 eV smaller than that at the SiO2/Si(100) interface. [ABSTRACT FROM AUTHOR]
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قاعدة البيانات: Complementary Index
الوصف
تدمد:00036951
DOI:10.1063/1.3407515