التفاصيل البيبلوغرافية
| العنوان: |
Design and Simulation Study of an Optical Mode-Localized MEMS Accelerometer. |
| المؤلفون: |
Feng, Yu, Yang, Wuhao, Zou, Xudong |
| المصدر: |
Micromachines; Jan2023, Vol. 14 Issue 1, p39, 13p |
| مصطلحات موضوعية: |
DIRECTIONAL couplers, FINITE element method, OPTICAL sensors, ACCELEROMETERS, EXPERIMENTAL design, RESONATORS |
| مستخلص: |
In this paper, we demonstrate a novel photonic integrated accelerometer based on the optical mode localization sensing mechanism, which is designed on an SOI wafer with a device layer thickness of 220 nm. High sensitivity and large measurement range can be achieved by integrating coupled ring resonators with a suspended directional coupler on a proof mass. With the help of FEA simulation and numerical analysis, the proposed optical mode-localized sensor presents a sensitivity of 10/g (modal power ratio/acceleration) and an inertial displacement of from −8 to 10 microns corresponding to a range from −23.5 to 29.4 g. The free spectral range is 4.05 nm around 1.55 microns. The acceleration resolution limited by thermomechanical noise is 4.874 μg. The comprehensive performance of this design is competitive with existing MEMS mode localized accelerometers. It demonstrates the potential of the optical mode-localized inertial sensors as candidates for state-of-the-art sensors in the future. [ABSTRACT FROM AUTHOR] |
|
Copyright of Micromachines is the property of MDPI and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) |
| قاعدة البيانات: |
Complementary Index |
Full Text Finder