التفاصيل البيبلوغرافية
| العنوان: |
Surface-limited deuterium uptake of Ru films under plasma exposure. |
| المؤلفون: |
Wang, S. C., Zoethout, E., van Kampen, M., Morgan, T. W. |
| المصدر: |
Journal of Applied Physics; 12/14/2022, Vol. 132 Issue 22, p1-13, 13p |
| مصطلحات موضوعية: |
HYDROGEN plasmas, DEUTERIUM, DEUTERIUM ions, FUSION reactors, ION bombardment, DEUTERIUM plasma, NUCLEAR reactor materials |
| مستخلص: |
Blister formation has been an emerging research topic for extreme ultraviolet (EUV) mirrors exposed to hydrogen plasmas. Similar to plasma-facing materials in nuclear fusion reactors, it has been reported that blister formation in EUV mirrors is initiated by hydrogen uptake due to hydrogen ion or atom bombardment. However, the research so far has focused on Mo/Si multilayers exposed to only hydrogen ions or atoms, while the EUV mirror typically has a Ru capping layer facing hydrogen plasmas. We present experimental work to measure plasma-induced hydrogen uptake of Ru films. We bombarded our designed Ru-capped target with a low-temperature deuterium plasma and measured the deuterium retention using elastic recoil detection. Contrary to ion-driven deuterium uptake, the deuterium uptake rate of the Ru film had no dependence on the deuterium ion flux or energy after a period of plasma exposure. A reaction–diffusion model has been built to calculate the time evolution of deuterium retention, which well fits the experimental data. Based on this model, we conclude that the surface composition of the Ru film is the limiting factor for the deuterium uptake, which is seriously weakened when the surface is covered by Ru oxide. After the Ru oxide is reduced by the plasma, the uptake rate is predominantly driven by the deuterium surface coverage on metallic Ru. Our model also indicates that at the deuterium-populated Ru surface, deuterium has a low absorption barrier to penetrate the surface, which is supported by previously reported computational work. [ABSTRACT FROM AUTHOR] |
|
Copyright of Journal of Applied Physics is the property of American Institute of Physics and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) |
| قاعدة البيانات: |
Complementary Index |
