دورية أكاديمية

Parametric Noise Reduction in a High-Order Nonlinear MEMS Resonator Utilizing Its Bifurcation Points.

التفاصيل البيبلوغرافية
العنوان: Parametric Noise Reduction in a High-Order Nonlinear MEMS Resonator Utilizing Its Bifurcation Points.
المؤلفون: Sobreviela, Guillermo, Zhao, Chun, Pandit, Milind, Do, Cuong, Du, Sijun, Zou, Xudong, Seshia, Ashwin
المصدر: Journal of Microelectromechanical Systems; Dec2017, Vol. 26 Issue 6, p1189-1195, 7p
مصطلحات موضوعية: MICROELECTROMECHANICAL systems, ELECTROMECHANICAL devices, RADIO frequency, VIBRATION (Mechanics), ELECTRONIC amplifiers
مستخلص: An electrostatically actuated non-linear microelectromechanical systems (MEMS) resonator can describe double hysteresis behavior in the measured frequency response due to the interplay between electrical and mechanical non-linearities in the system. This paper provides the first experimental mapping of the stable and unstable branches of the frequency response of a MEMS resonator describing a double hysteretic frequency response using a closed-loop phase feedback oscillator. Furthermore, the frequency stability of the oscillator is compared for varying amplitude and phase feedback conditions, and it is experimentally demonstrated that parametric noise up-conversion can be suppressed in such a system by suitably biasing the resonator at one of the four bifurcation points in such a system. This result is qualitatively consistent with theoretical prediction and demonstrates that improved frequency stability in a non-linear MEMS oscillator is possible by suitably biasing the resonator using simultaneous amplitude and phase feedback. [ABSTRACT FROM PUBLISHER]
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قاعدة البيانات: Complementary Index
الوصف
تدمد:10577157
DOI:10.1109/JMEMS.2017.2736022