التفاصيل البيبلوغرافية
| العنوان: |
Effect of fabrication parameters on the ferroelectricity of hafnium zirconium oxide films: A statistical study. |
| المؤلفون: |
Salcedo, Guillermo A.1 (AUTHOR) guillermo.salcedo@us.af.mil, Islam, Ahmad E.2 (AUTHOR) aeislam@ieee.org, Reichley, Elizabeth2 (AUTHOR), Dietz, Michael3 (AUTHOR), Schubert-Kabban, Christine M.4 (AUTHOR), Leedy, Kevin D.2 (AUTHOR), Back, Tyson C.5 (AUTHOR), Wang, Weisong3 (AUTHOR), Green, Andrew2 (AUTHOR), Wolfe, Timothy1 (AUTHOR), Sattler, James M.1 (AUTHOR) |
| المصدر: |
Journal of Applied Physics. 3/28/2024, Vol. 135 Issue 12, p1-8. 8p. |
| مصطلحات موضوعية: |
*HAFNIUM oxide films, *FERROELECTRICITY, *HYDROFLUORIC acid, *ZIRCONIUM oxide, *HAFNIUM oxide |
| مستخلص: |
Ferroelectricity in hafnium zirconium oxide (Hf1 − xZrxO2) and the factors that impact it have been a popular research topic since its discovery in 2011. Although the general trends are known, the interactions between fabrication parameters and their effect on the ferroelectricity of Hf1 − xZrxO2 require further investigation. In this paper, we present a statistical study and a model that relates Zr concentration (x), film thickness (tf), and annealing temperature (Ta) with the remanent polarization (Pr) in tungsten (W)-capped Hf1 − xZrxO2. This work involved the fabrication and characterization of 36 samples containing multiple sets of metal-ferroelectric-metal capacitors while varying x (0.26, 0.48, and 0.57), tf (10 and 19 nm), and Ta (300, 400, 500, and 600 ° C). In addition to the well-understood effects of x and Ta on the ferroelectricity of Hf1 − xZrxO2, the statistical analysis showed that thicker Hf1 − xZrxO2 films or films with higher x require lower Ta to crystallize and demonstrated that there is no statistical difference between samples annealed to 500 and 600 ° C, thus suggesting that most films fully crystallize with Ta ∼ 500 ° C for 60 s. Our model explains 95% of the variability in the Pr data for the films fabricated, presents the estimates of the phase composition of the film, and provides a starting point for selecting fabrication parameters when a specific Pr is desired. [ABSTRACT FROM AUTHOR] |
| قاعدة البيانات: |
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