التفاصيل البيبلوغرافية
| العنوان: |
PBr3 adsorption on a chlorinated Si(100) surface with mono- and bivacancies. |
| المؤلفون: |
Pavlova, T. V.1,2 (AUTHOR) pavlova@kapella.gpi.ru, Shevlyuga, V. M.1 (AUTHOR) |
| المصدر: |
Journal of Chemical Physics. 2/7/2024, Vol. 160 Issue 5, p1-7. 7p. |
| مصطلحات موضوعية: |
*SCANNING tunneling microscopy, *DENSITY functional theory, *ADSORPTION (Chemistry), *ADATOMS, *CHLORINE, *MONOMOLECULAR films |
| مستخلص: |
For the most precise incorporation of single impurities in silicon, which is utilized to create quantum devices, a monolayer of adatoms on the Si(100) surface and a dopant-containing molecule are used. Here, we studied the interaction of phosphorus tribromide with a chlorine monolayer with mono- and bivacancies using a scanning tunneling microscope (STM) at 77 K. The combination of different halogens in the molecule and the adsorbate layer enabled unambiguous identification of the structures after PBr3 dissociation on Si(100)-Cl. A Cl monolayer was exposed to PBr3 in the STM chamber, which allows us to compare the same surface areas before and after PBr3 adsorption. As a result of this comparison, we detected small changes in the chlorine layer and unraveled the molecular fragments filling mono- and bivacancies. Using density functional theory, we found that the phosphorus atom occupies a bridge position after dissociation of the PBr3 molecule, which primarily bonds with silicon in Cl bivacancies. These findings provide insight into the interaction of a dopant-containing molecule with an adsorbate monolayer on Si(100) and can be applied to improve the process of single impurity incorporation into silicon. [ABSTRACT FROM AUTHOR] |
| قاعدة البيانات: |
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