دورية أكاديمية
Direct Printing of Ultrathin Block Copolymer Film with Nano‐in‐Micro Pattern Structures
العنوان: | Direct Printing of Ultrathin Block Copolymer Film with Nano‐in‐Micro Pattern Structures |
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المؤلفون: | Tae Wan Park, Young Lim Kang, Eun Bin Kang, Hyunsung Jung, Seoung‐Ki Lee, Geon‐Tae Hwang, Jung Woo Lee, Si‐Young Choi, Sahn Nahm, Se‐Hun Kwon, Kwang Ho kim, Woon Ik Park |
المصدر: | Advanced Science, Vol 10, Iss 29, Pp n/a-n/a (2023) |
بيانات النشر: | Wiley, 2023. |
سنة النشر: | 2023 |
المجموعة: | LCC:Science |
مصطلحات موضوعية: | block copolymer, nanopatterning, nanotransfer printing, self‐assembly, wafer scale, Science |
الوصف: | Abstract Nanotransfer printing (nTP) is one of the most promising nanopatterning methods given that it can be used to produce nano‐to‐micro patterns effectively with functionalities for electronic device applications. However, the nTP process is hindered by several critical obstacles, such as sub‐20 nm mold technology, reliable large‐area replication, and uniform transfer‐printing of functional materials. Here, for the first time, a dual nanopatterning process is demonstrated that creates periodic sub‐20 nm structures on the eight‐inch wafer by the transfer‐printing of patterned ultra‐thin ( |
نوع الوثيقة: | article |
وصف الملف: | electronic resource |
اللغة: | English |
تدمد: | 2198-3844 |
العلاقة: | https://doaj.org/toc/2198-3844Test |
DOI: | 10.1002/advs.202303412 |
الوصول الحر: | https://doaj.org/article/9f37dffdca7f4386824aaf573a0cfb5aTest |
رقم الانضمام: | edsdoj.9f37dffdca7f4386824aaf573a0cfb5a |
قاعدة البيانات: | Directory of Open Access Journals |