A manufacturable dual channel (Si and SiGe) high-k metal gate CMOS technology with multiple oxides for high performance and low power applications

التفاصيل البيبلوغرافية
العنوان: A manufacturable dual channel (Si and SiGe) high-k metal gate CMOS technology with multiple oxides for high performance and low power applications
المؤلفون: Krishnan, S., Kwon, U., Moumen, N., Stoker, M.W., Harley, E.C.T., Bedell, S., Nair, D., Greene, B., Henson, W., Chowdhury, M., Prakash, D.P., Wu, E., Ioannou, D., Cartier, E., Na, M.-H., Inumiya, S., Mcstay, K., Edge, L., Iijima, R., Cai, J., Frank, M., Hargrove, M., Guo, D., Kerber, A., Jagannathan, H., Ando, T., Shepard, J., Siddiqui, S., Dai, M., Bu, H., Schaeffer, J., Jaeger, D., Barla, K., Wallner, T., Uchimura, S., Lee, Y., Karve, G., Zafar, S., Schepis, D., Wang, Y., Donaton, R., Saroop, S., Montanini, P., Liang, Y., Stathis, J., Carter, R., Pal, R., Paruchuri, V., Yamasaki, H., Lee, J-H.
المصدر: 2011 International Electron Devices Meeting
بيانات النشر: IEEE
سنة النشر: 2011
نوع الوثيقة: conference object
اللغة: unknown
DOI: 10.1109/iedm.2011.6131628
الإتاحة: https://doi.org/10.1109/iedm.2011.6131628Test
http://xplorestaging.ieee.org/ielx5/6123666/6131464/06131628.pdf?arnumber=6131628Test
رقم الانضمام: edsbas.5758065A
قاعدة البيانات: BASE
ResultId 1
Header edsbas
BASE
edsbas.5758065A
788
3
Conference
conference
787.654235839844
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsbas&AN=edsbas.5758065A&custid=s6537998&authtype=sso
FullText Array ( [Availability] => 0 )
Array ( [0] => Array ( [Url] => https://doi.org/10.1109/iedm.2011.6131628# [Name] => EDS - BASE [Category] => fullText [Text] => View record in BASE [MouseOverText] => View record in BASE ) )
Items Array ( [Name] => Title [Label] => Title [Group] => Ti [Data] => A manufacturable dual channel (Si and SiGe) high-k metal gate CMOS technology with multiple oxides for high performance and low power applications )
Array ( [Name] => Author [Label] => Authors [Group] => Au [Data] => <searchLink fieldCode="AR" term="%22Krishnan%2C+S%2E%22">Krishnan, S.</searchLink><br /><searchLink fieldCode="AR" term="%22Kwon%2C+U%2E%22">Kwon, U.</searchLink><br /><searchLink fieldCode="AR" term="%22Moumen%2C+N%2E%22">Moumen, N.</searchLink><br /><searchLink fieldCode="AR" term="%22Stoker%2C+M%2EW%2E%22">Stoker, M.W.</searchLink><br /><searchLink fieldCode="AR" term="%22Harley%2C+E%2EC%2ET%2E%22">Harley, E.C.T.</searchLink><br /><searchLink fieldCode="AR" term="%22Bedell%2C+S%2E%22">Bedell, S.</searchLink><br /><searchLink fieldCode="AR" term="%22Nair%2C+D%2E%22">Nair, D.</searchLink><br /><searchLink fieldCode="AR" term="%22Greene%2C+B%2E%22">Greene, B.</searchLink><br /><searchLink fieldCode="AR" term="%22Henson%2C+W%2E%22">Henson, W.</searchLink><br /><searchLink fieldCode="AR" term="%22Chowdhury%2C+M%2E%22">Chowdhury, M.</searchLink><br /><searchLink fieldCode="AR" term="%22Prakash%2C+D%2EP%2E%22">Prakash, D.P.</searchLink><br /><searchLink fieldCode="AR" term="%22Wu%2C+E%2E%22">Wu, E.</searchLink><br /><searchLink fieldCode="AR" term="%22Ioannou%2C+D%2E%22">Ioannou, D.</searchLink><br /><searchLink fieldCode="AR" term="%22Cartier%2C+E%2E%22">Cartier, E.</searchLink><br /><searchLink fieldCode="AR" term="%22Na%2C+M%2E-H%2E%22">Na, M.-H.</searchLink><br /><searchLink fieldCode="AR" term="%22Inumiya%2C+S%2E%22">Inumiya, S.</searchLink><br /><searchLink fieldCode="AR" term="%22Mcstay%2C+K%2E%22">Mcstay, K.</searchLink><br /><searchLink fieldCode="AR" term="%22Edge%2C+L%2E%22">Edge, L.</searchLink><br /><searchLink fieldCode="AR" term="%22Iijima%2C+R%2E%22">Iijima, R.</searchLink><br /><searchLink fieldCode="AR" term="%22Cai%2C+J%2E%22">Cai, J.</searchLink><br /><searchLink fieldCode="AR" term="%22Frank%2C+M%2E%22">Frank, M.</searchLink><br /><searchLink fieldCode="AR" term="%22Hargrove%2C+M%2E%22">Hargrove, M.</searchLink><br /><searchLink fieldCode="AR" term="%22Guo%2C+D%2E%22">Guo, D.</searchLink><br /><searchLink fieldCode="AR" term="%22Kerber%2C+A%2E%22">Kerber, A.</searchLink><br /><searchLink fieldCode="AR" term="%22Jagannathan%2C+H%2E%22">Jagannathan, H.</searchLink><br /><searchLink fieldCode="AR" term="%22Ando%2C+T%2E%22">Ando, T.</searchLink><br /><searchLink fieldCode="AR" term="%22Shepard%2C+J%2E%22">Shepard, J.</searchLink><br /><searchLink fieldCode="AR" term="%22Siddiqui%2C+S%2E%22">Siddiqui, S.</searchLink><br /><searchLink fieldCode="AR" term="%22Dai%2C+M%2E%22">Dai, M.</searchLink><br /><searchLink fieldCode="AR" term="%22Bu%2C+H%2E%22">Bu, H.</searchLink><br /><searchLink fieldCode="AR" term="%22Schaeffer%2C+J%2E%22">Schaeffer, J.</searchLink><br /><searchLink fieldCode="AR" term="%22Jaeger%2C+D%2E%22">Jaeger, D.</searchLink><br /><searchLink fieldCode="AR" term="%22Barla%2C+K%2E%22">Barla, K.</searchLink><br /><searchLink fieldCode="AR" term="%22Wallner%2C+T%2E%22">Wallner, T.</searchLink><br /><searchLink fieldCode="AR" term="%22Uchimura%2C+S%2E%22">Uchimura, S.</searchLink><br /><searchLink fieldCode="AR" term="%22Lee%2C+Y%2E%22">Lee, Y.</searchLink><br /><searchLink fieldCode="AR" term="%22Karve%2C+G%2E%22">Karve, G.</searchLink><br /><searchLink fieldCode="AR" term="%22Zafar%2C+S%2E%22">Zafar, S.</searchLink><br /><searchLink fieldCode="AR" term="%22Schepis%2C+D%2E%22">Schepis, D.</searchLink><br /><searchLink fieldCode="AR" term="%22Wang%2C+Y%2E%22">Wang, Y.</searchLink><br /><searchLink fieldCode="AR" term="%22Donaton%2C+R%2E%22">Donaton, R.</searchLink><br /><searchLink fieldCode="AR" term="%22Saroop%2C+S%2E%22">Saroop, S.</searchLink><br /><searchLink fieldCode="AR" term="%22Montanini%2C+P%2E%22">Montanini, P.</searchLink><br /><searchLink fieldCode="AR" term="%22Liang%2C+Y%2E%22">Liang, Y.</searchLink><br /><searchLink fieldCode="AR" term="%22Stathis%2C+J%2E%22">Stathis, J.</searchLink><br /><searchLink fieldCode="AR" term="%22Carter%2C+R%2E%22">Carter, R.</searchLink><br /><searchLink fieldCode="AR" term="%22Pal%2C+R%2E%22">Pal, R.</searchLink><br /><searchLink fieldCode="AR" term="%22Paruchuri%2C+V%2E%22">Paruchuri, V.</searchLink><br /><searchLink fieldCode="AR" term="%22Yamasaki%2C+H%2E%22">Yamasaki, H.</searchLink><br /><searchLink fieldCode="AR" term="%22Lee%2C+J-H%2E%22">Lee, J-H.</searchLink> )
Array ( [Name] => TitleSource [Label] => Source [Group] => Src [Data] => 2011 International Electron Devices Meeting )
Array ( [Name] => Publisher [Label] => Publisher Information [Group] => PubInfo [Data] => IEEE )
Array ( [Name] => DatePubCY [Label] => Publication Year [Group] => Date [Data] => 2011 )
Array ( [Name] => TypeDocument [Label] => Document Type [Group] => TypDoc [Data] => conference object )
Array ( [Name] => Language [Label] => Language [Group] => Lang [Data] => unknown )
Array ( [Name] => DOI [Label] => DOI [Group] => ID [Data] => 10.1109/iedm.2011.6131628 )
Array ( [Name] => URL [Label] => Availability [Group] => URL [Data] => https://doi.org/10.1109/iedm.2011.6131628<br />http://xplorestaging.ieee.org/ielx5/6123666/6131464/06131628.pdf?arnumber=6131628 )
Array ( [Name] => AN [Label] => Accession Number [Group] => ID [Data] => edsbas.5758065A )
RecordInfo Array ( [BibEntity] => Array ( [Identifiers] => Array ( [0] => Array ( [Type] => doi [Value] => 10.1109/iedm.2011.6131628 ) ) [Languages] => Array ( [0] => Array ( [Text] => unknown ) ) [Titles] => Array ( [0] => Array ( [TitleFull] => A manufacturable dual channel (Si and SiGe) high-k metal gate CMOS technology with multiple oxides for high performance and low power applications [Type] => main ) ) ) [BibRelationships] => Array ( [HasContributorRelationships] => Array ( [0] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Krishnan, S. ) ) ) [1] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Kwon, U. ) ) ) [2] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Moumen, N. ) ) ) [3] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Stoker, M.W. ) ) ) [4] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Harley, E.C.T. ) ) ) [5] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Bedell, S. ) ) ) [6] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Nair, D. ) ) ) [7] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Greene, B. ) ) ) [8] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Henson, W. ) ) ) [9] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Chowdhury, M. ) ) ) [10] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Prakash, D.P. ) ) ) [11] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Wu, E. ) ) ) [12] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Ioannou, D. ) ) ) [13] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Cartier, E. ) ) ) [14] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Na, M.-H. ) ) ) [15] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Inumiya, S. ) ) ) [16] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Mcstay, K. ) ) ) [17] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Edge, L. ) ) ) [18] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Iijima, R. ) ) ) [19] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Cai, J. ) ) ) [20] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Frank, M. ) ) ) [21] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Hargrove, M. ) ) ) [22] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Guo, D. ) ) ) [23] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Kerber, A. ) ) ) [24] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Jagannathan, H. ) ) ) [25] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Ando, T. ) ) ) [26] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Shepard, J. ) ) ) [27] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Siddiqui, S. ) ) ) [28] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Dai, M. ) ) ) [29] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Bu, H. ) ) ) [30] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Schaeffer, J. ) ) ) [31] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Jaeger, D. ) ) ) [32] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Barla, K. ) ) ) [33] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Wallner, T. ) ) ) [34] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Uchimura, S. ) ) ) [35] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Lee, Y. ) ) ) [36] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Karve, G. ) ) ) [37] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Zafar, S. ) ) ) [38] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Schepis, D. ) ) ) [39] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Wang, Y. ) ) ) [40] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Donaton, R. ) ) ) [41] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Saroop, S. ) ) ) [42] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Montanini, P. ) ) ) [43] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Liang, Y. ) ) ) [44] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Stathis, J. ) ) ) [45] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Carter, R. ) ) ) [46] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Pal, R. ) ) ) [47] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Paruchuri, V. ) ) ) [48] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Yamasaki, H. ) ) ) [49] => Array ( [PersonEntity] => Array ( [Name] => Array ( [NameFull] => Lee, J-H. ) ) ) ) [IsPartOfRelationships] => Array ( [0] => Array ( [BibEntity] => Array ( [Dates] => Array ( [0] => Array ( [D] => 01 [M] => 01 [Type] => published [Y] => 2011 ) ) [Identifiers] => Array ( [0] => Array ( [Type] => issn-locals [Value] => edsbas ) ) [Titles] => Array ( [0] => Array ( [TitleFull] => 2011 International Electron Devices Meeting [Type] => main ) ) ) ) ) ) )
IllustrationInfo