مؤتمر
Analysis of Nickel Silicides by SIMS and LEAP.
العنوان: | Analysis of Nickel Silicides by SIMS and LEAP. |
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المؤلفون: | Ronsheim, Paul, McMurray, Jeff, Flaitz, Philip, Parks, Christopher, Thompson, Keith, Larson, David, Kelly, Thomas F. |
المصدر: | AIP Conference Proceedings; 9/26/2007, Vol. 931 Issue 1, p129-136, 8p, 4 Diagrams, 8 Graphs |
مصطلحات موضوعية: | SECONDARY ion mass spectrometry, SILICIDES, ANALYTICAL chemistry, ELECTRODES, METALLURGICAL segregation, SIMULATED annealing |
مستخلص: | Ni-silicides formed by a variety of processing techniques were studied with secondary ion mass spectroscopy (SIMS) and local electrode atom probe (LEAP®) analysis. SIMS provided 1-D chemical analysis over an approximately 60 micron diameter area. LEAP provided 3-D atom identities and locations over an approximately 100–150 nm diameter area. It was determined that the 200 °C drive-in anneal results in a Ni |
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قاعدة البيانات: | Complementary Index |