In order to solve the problems of low transmission rate and large device size of electro-optical modulator, an electro-optic half subtractor based on silicon-based hybrid surface plasmon polariton waveguide is proposed in this study. The proposed device utilizes three units metal-oxide-semiconductor capacitor structure to achieve the half subtractor logic function of electro-optic control, improving the transmission rate of the electro-optic half subtractor while also reducing the device size using surface plasmon polariton technology, with a size of only 32 μm × 4.3 μm. At the same time, the use of hybrid silicon waveguides reduces the sharp Ohmic attenuation caused by surface plasmon polaritons and reduces optical insertion losses (ILs). The simulation results show that when the electro-optic half subtractor operates at the wavelength of 1,550 nm, the IL difference is 1.0 dB in each state, the transmission rate of the device is 0.75 Tbit/s, and the energy consumption is 12.69 fj/bit.
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