المؤلفون: Menno POOT

المصدر: Sensors & Transducers, Vol 263, Iss 4, Pp 1-11 (2023)

مصطلحات موضوعية: optomechanics, film stress, aluminum nitride (aln), mems, silicon nitride (sin), bilayer membrane, finite-element simulations (fem), mechanical band structure, Technology (General), T1-995

وصف الملف: electronic resource

العلاقة: https://sensorsportal.com/HTML/DIGEST/december_2023/Vol_263/P_3307.pdfTest; https://doaj.org/toc/2306-8515Test; https://doaj.org/toc/1726-5479Test

الوصول الحر: https://doaj.org/article/e12d69b6c48943dcbdf45f0d2236790eTest

المؤلفون: Yasutaka UCHIDA, Tomoko FUNAYAMA, Eiichi OHKUBO, Yoshiaki KOGURE

المصدر: Sensors & Transducers, Vol 263, Iss 4, Pp 12-20 (2023)

مصطلحات موضوعية: optomechanics, film stress, aluminum nitride (aln), mems, silicon nitride (sin), bilayer membrane, finite-element simulations (fem), mechanical band structure., Technology (General), T1-995

وصف الملف: electronic resource

العلاقة: https://sensorsportal.com/HTML/DIGEST/december_2023/Vol_263/P_3308.pdfTest; https://doaj.org/toc/2306-8515Test; https://doaj.org/toc/1726-5479Test

الوصول الحر: https://doaj.org/article/8eb762c796c74abd83d69051089161ecTest

المؤلفون: Patrice Bras, Christian Morawe, Sylvain Labouré, François Perrin, Amparo Vivo, Raymond Barrett

المصدر: Journal of Synchrotron Radiation, Vol 30, Iss 4, Pp 708-716 (2023)

مصطلحات موضوعية: x-ray optics, figure correction, differential deposition, surface roughness, film stress, off-line metrology, fizeau stitching, long trace profiler, magnetron sputtering, Nuclear and particle physics. Atomic energy. Radioactivity, QC770-798, Crystallography, QD901-999

وصف الملف: electronic resource

العلاقة: http://scripts.iucr.org/cgi-bin/paper?S1600577523003697Test; https://doaj.org/toc/1600-5775Test

الوصول الحر: https://doaj.org/article/141f85541779422d937a254d94e9a396Test

المؤلفون: Abubaker M. Tareki, Connor Kupchak, Khaled Mnaymneh

المصدر: IEEE Photonics Journal, Vol 15, Iss 4, Pp 1-7 (2023)

مصطلحات موضوعية: Film deposition, film stress, microfabrication, nanotechnology, nonlinear refractive index, silicon nitride, Applied optics. Photonics, TA1501-1820, Optics. Light, QC350-467

وصف الملف: electronic resource

العلاقة: https://ieeexplore.ieee.org/document/10146373Test/; https://doaj.org/toc/1943-0655Test

الوصول الحر: https://doaj.org/article/2da0381ce00b427ba4314392ff6aaaccTest

المؤلفون: Boyu Guo, Mihirsinh Chauhan, Nathaniel R. Woodward, Gabriel R. McAndrews, Gaurab J. Thapa, Benjamin M. Lefler, Ruipeng Li, Tonghui Wang, Kasra Darabi, Michael D. McGehee, Aram Amassian

مصطلحات موضوعية: Biophysics, Molecular Biology, Evolutionary Biology, Cancer, Physical Sciences not elsewhere classified, transfer mechanical forces, including substrate curvature, dynamically balancing forces, achieve dynamic control, processed mhp films, perovskite top crust, mhp film formation, mhp photovoltaics, mhp crust, free films, film stress, wrinkling evolutions, utilize multimodal, surface wrinkles, surface morphology, study provides, situ <, promising candidates, powerful toolkit, performance tandems, growing area

العلاقة: https://figshare.com/articles/journal_contribution/_i_In_situ_i_Stress_Monitoring_Reveals_Tension_and_Wrinkling_Evolutions_during_Halide_Perovskite_Film_Formation/24759529Test

الإتاحة: https://doi.org/10.1021/acsenergylett.3c02079.s003Test
https://figshare.com/articles/journal_contribution/_i_In_situ_i_Stress_Monitoring_Reveals_Tension_and_Wrinkling_Evolutions_during_Halide_Perovskite_Film_Formation/24759529Test

المؤلفون: Masaru Tanaka, Yota Iijima, Yusuke Masuda, Tsubasa Sato, Takashi Mineta

المصدر: Electronics; Volume 12; Issue 14; Pages: 3153

مصطلحات موضوعية: deflection adjustment, film stress, Al thin film, Ni thin film, plastic deformation, dual AFM cantilever

وصف الملف: application/pdf

العلاقة: Artificial Intelligence; https://dx.doi.org/10.3390/electronics12143153Test

الإتاحة: https://doi.org/10.3390/electronics12143153Test

المؤلفون: Wenkuan Man, Thomas G. Bifano

المصدر: Micromachines; Volume 14; Issue 4; Pages: 740

مصطلحات موضوعية: deformable mirror, micromachines, electromagnetic actuation, packaging and assembly, thin-film stress

وصف الملف: application/pdf

العلاقة: D：Materials and Processing; https://dx.doi.org/10.3390/mi14040740Test

الإتاحة: https://doi.org/10.3390/mi14040740Test

المؤلفون: Yasutaka UCHIDA, Tomoko FUNAYAMA, Eiichi OHKUBO, Yoshiaki KOGURE

المصدر: Sensors & Transducers, Vol 263, Iss 4, Pp 12-20 (2023)

مصطلحات موضوعية: optomechanics, film stress, aluminum nitride (aln), mems, silicon nitride (sin), bilayer membrane, finite-element simulations (fem), mechanical band structure, Technology (General), T1-995

العلاقة: https://sensorsportal.com/HTML/DIGEST/december_2023/Vol_263/P_3308.pdfTest; https://doaj.org/toc/2306-8515Test; https://doaj.org/toc/1726-5479Test; https://doaj.org/article/8eb762c796c74abd83d69051089161ecTest

الإتاحة: https://doaj.org/article/8eb762c796c74abd83d69051089161ecTest

المؤلفون: Congcong Liang, Yuan Zhong, Qing Zhong, Jinjin Li, Wenhui Cao, Xueshen Wang, Shijian Wang, Xiaolong Xu, Jian Wang, Yue Cao

المصدر: Coatings; Volume 12; Issue 10; Pages: 1411

مصطلحات موضوعية: inductively coupled plasma-chemical vapor deposition, film stress, silicon oxide, step coverage

وصف الملف: application/pdf

العلاقة: https://dx.doi.org/10.3390/coatings12101411Test

الإتاحة: https://doi.org/10.3390/coatings12101411Test

المؤلفون: Massahi, S., Ferreira, D. D. M., Christensen, F. E., Svendsen, S., Gellert, N., 'S Jegers, A., Collon, M., Landgraf, B., Thete, A., Ferreira, I., Bavdaz, M., Shortt, B., Schönberger, W., Langer, A., Krumrey, M., Gollwitzer, C., Handick, E.

المساهمون: A. den Herder, Jan-Willem, Nikzad, Shouleh, Nakazawa, Kazuhiro

المصدر: Massahi , S , Ferreira , D D M , Christensen , F E , Svendsen , S , Gellert , N , 'S Jegers , A , Collon , M , Landgraf , B , Thete , A , Ferreira , I , Bavdaz , M , Shortt , B , Schönberger , W , Langer , A , Krumrey , M , Gollwitzer , C & Handick , E 2022 , Coating process parameter influence on thin films for the ATHENA x-ray optics . in J-W A. den Herder , S Nikzad & K Nakazawa (eds) , ....

مصطلحات موضوعية: X–ray optics, DC magnetron sputtering, Silicon Pore Optics, ATHENA, Working gas pressure, Discharge power, Discharge voltage, Residual film stress

وصف الملف: application/pdf

العلاقة: https://orbit.dtu.dk/en/publications/aed0a161-aa5d-4b18-bcb7-fc2b5f57afe7Test

الإتاحة: https://doi.org/10.1117/12.2630726Test
https://orbit.dtu.dk/en/publications/aed0a161-aa5d-4b18-bcb7-fc2b5f57afe7Test
https://backend.orbit.dtu.dk/ws/files/289475015/121814F.pdfTest