المؤلفون: Zuev, S. Yu.¹ (AUTHOR), Lopatin, A. Ya.¹ (AUTHOR), Luchin, V. I.¹ (AUTHOR), Salashchenko, N. N.¹ (AUTHOR), Tatarskiy, D. A.¹ (AUTHOR), Tsybin, N. N.¹ (AUTHOR) tsybin@ipmras.ru, Chkhalo, N. I.¹ (AUTHOR)

المصدر: Technical Physics. 2023 Suppl 3, Vol. 68, pS630-S636. 7p.

مصطلحات موضوعية: *THERMAL stability, *THIN films, *BERYLLIUM, *POWER density, *COMPARATIVE studies, *EXTREME ultraviolet lithography

المؤلفون: Smertin, R. M., Zuev, S. Yu., Polkovnikov, V. N., Chkhalo, N. I.

المصدر: Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques; 2023 Suppl 1, Vol. 17, pS239-S243, 5p

المؤلفون: Smertin, R. M., Barysheva, M. M., Garakhin, S. A., Zorina, M. V., Zuev, S. Yu., Polkovnikov, V. N., Chkhalo, N. I., Radishchev, D. B.

المصدر: Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques; Dec2023, Vol. 17 Issue 6, p1350-1355, 6p

المؤلفون: Zuev, S. Yu.¹ (AUTHOR), Lopatin, A. Ya.¹ (AUTHOR), Luchin, V. I.¹ (AUTHOR), Salashchenko, N. N.¹ (AUTHOR), Tsybin, N. N.¹ (AUTHOR) tsybin@ipmras.ru, Chkhalo, N. I.¹ (AUTHOR)

المصدر: Russian Microelectronics. Oct2023, Vol. 52 Issue 5, p344-355. 12p.

مصطلحات موضوعية: *LITHOGRAPHY, *EXTREME ultraviolet lithography, *LITERATURE reviews, *THIN films, *WAVELENGTHS

المؤلفون: Goray, L. I., Berezovskaya, T. N., Mokhov, D. V., Sharov, V. A., Shubina, K. Yu., Pirogov, E. V., Dashkov, A. S., Nashchekin, A. V., Zorina, M. V., Barysheva, M. M., Garakhin, S. A., Zuev, S. Yu., Chkhalo, N. I.

المصدر: Bulletin of the Lebedev Physics Institute; 2023 Suppl 2, Vol. 50, pS250-S261, 12p

المؤلفون: Chkhalo, N. I., Garakhin, S. A., Lopatin, A. Ya., Nechay, A. N., Pestov, A. E., Polkovnikov, V. N., Salashchenko, N. N., Tsybin, N. N., Zuev, S. Yu.

المصدر: AIP Advances ; volume 8, issue 10 ; ISSN 2158-3226

الإتاحة: https://doi.org/10.1063/1.5048288Test

المؤلفون: null Chkhalo N. I., null Tsybin N. N., null Smertin R. M., null Salashchenko N. N., null Polkovnikov V. N., null Pleshkov R. S., null Perekalov A. A., null Pestov A. E., null Nechay A. N., null Lopatin A. Ya., null Zuev S. Yu., null Zabrodin I. G., null Garakhin S. A.

المصدر: Technical Physics. 92:2027

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::c297f2218c05a40c31c9964d5c08b944Test
https://doi.org/10.21883/tp.2022.13.52217.140-21Test

المؤلفون: null Chkhalo N. I., null Tsybin N. N., null Tatarskiy D. A., null Salashchenko N. N., null Luchin V. I., null Lopatin A. Ya., null Zuev S. Yu.

المصدر: Technical Physics. 92:68

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::c59fa7e1c043e0b16dd7b0c323560c13Test
https://doi.org/10.21883/tp.2022.01.52535.197-21Test

المؤلفون: Pleshkov, R., Zuev, S. Yu., Polkovnikov, V., Salashchenko, N., Svechnikov, M., Chkhalo, N., Jonnard, P.

المساهمون: Institute for Physics of Microstructures of the RAS, Russian Academy of Sciences Moscow (RAS), Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Institut de Chimie - CNRS Chimie (INC-CNRS)-Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS)

المصدر: ISSN: 1063-7842.

مصطلحات موضوعية: [PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other]

العلاقة: hal-03039857; https://hal.science/hal-03039857Test

الإتاحة: https://doi.org/10.1134/S1063784220110201Test
https://hal.science/hal-03039857Test

المؤلفون: Garakhin, S. A., Chkhalo, N. I., Kas’kov, I. A., Lopatin, A. Ya., Malyshev, I. V., Nechay, A. N., Pestov, A. E., Polkovnikov, V. N., Salashchenko, N. N., Svechnikov, M. V., Tsybin, N. N., Zabrodin, I. G., Zuev, S. Yu.

المساهمون: Russian Foundation for Basic Research, The State Assignment for IPM RAS

المصدر: Review of Scientific Instruments ; volume 91, issue 6 ; ISSN 0034-6748 1089-7623

الإتاحة: https://doi.org/10.1063/1.5144489Test