المؤلفون: Le, Tien Trong¹ (AUTHOR) tien.le@anu.edu.au, Yang, Zhongshu¹ (AUTHOR), Liang, Wensheng¹ (AUTHOR), Macdonald, Daniel¹ (AUTHOR), Liu, AnYao¹ (AUTHOR) anyao.liu@anu.edu.au

المصدر: Journal of Applied Physics. 2/14/2024, Vol. 135 Issue 6, p1-7. 7p.

مصطلحات موضوعية: *ALUMINUM oxide films, *SILICON oxide films, *SILICON wafers, *GETTERING, *SILICON solar cells, *ATOMIC layer deposition

المؤلفون: Omura, Yasuhisa^1,2 (AUTHOR) omuray@kansai-u.ac.jp, Mallik, Abhijit³ (AUTHOR)

المصدر: Journal of Applied Physics. 8/14/2023, Vol. 134 Issue 6, p1-15. 15p.

مصطلحات موضوعية: *SILICON oxide films, *CHEMICAL reactions, *CHEMICAL processes, *REACTION-diffusion equations, *OXIDE coating

المؤلفون: Chang, Mao-Nan¹ (AUTHOR) mnchang@dragon.nchu.edu.tw, Wu, Yi-Shan² (AUTHOR) 513excellent@gmail.com, Lin, Chiao-Jung² (AUTHOR) apple11122237@gmail.com, Hsueh, Yu-Hsun² (AUTHOR) h44444y@gmail.com, Su, Chun-Jung³ (AUTHOR) cjsu@nycu.edu.tw, Lee, Yao-Jen⁴ (AUTHOR) yjlee1976@nycu.edu.tw

المصدر: Nanomaterials (2079-4991). Jun2024, Vol. 14 Issue 11, p934. 12p.

مصطلحات موضوعية: *SILICON oxide films, *ELECTRIC capacity, *OXIDE coating, *MICROSCOPY, *SILICON solar cells, *OXIDES

المؤلفون: Niu, Jiwei¹ (AUTHOR), Wang, Zhoufu¹ (AUTHOR) whwangzf@163.com, Sun, Huayun² (AUTHOR), Liu, Hao¹ (AUTHOR), Ma, Yan¹ (AUTHOR), Pang, Hongxing¹ (AUTHOR), Dong, Yunjie¹ (AUTHOR), Song, Haokai¹ (AUTHOR), Shu, Chao¹ (AUTHOR)

المصدر: Ceramics International. May2024:Part B, Vol. 50 Issue 9, p16253-16262. 10p.

مصطلحات موضوعية: *NANOPARTICLE size, *SILICON oxide films, *PHENOLIC resins, *HEAT treatment, *CRYSTAL grain boundaries

المؤلفون: Satoru Yoshimura¹ yosimura@ppl.eng.osaka-u.ac.jp, Satoshi Sugimoto¹, Takae Takeuchi¹, Kensuke Murai², Masato Kiuchi^1,3

المصدر: AIP Advances. Nov2023, Vol. 13 Issue 11, p1-6. 6p.

مصطلحات موضوعية: *SILICON oxide films, *ETHYL silicate, *SILICON oxide, *X-ray photoelectron spectroscopy, *ION beams

المؤلفون: Herguedas, Natalia¹ (AUTHOR) nherguedas@unizar.es, Carretero, Enrique¹ (AUTHOR) ecarre@unizar.es

المصدر: Nanomaterials (2079-4991). Oct2023, Vol. 13 Issue 20, p2749. 12p.

مصطلحات موضوعية: *SILICON oxide films, *OPTICAL properties, *FOURIER transform infrared spectroscopy, *REFRACTIVE index, *STOICHIOMETRY, *NEAR infrared spectroscopy

المؤلفون: Urban, F. K., Barton, D.

المصدر: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Jul2024, Vol. 42 Issue 4, p1-7, 7p

مصطلحات موضوعية: SILICON oxide films, INDIUM tin oxide, ARTIFICIAL intelligence, ARTIFICIAL neural networks, ELLIPSOMETRY

المؤلفون: Yang, Congxing, Zhang, Chunpeng, Ai, Fei

المصدر: SID Symposium Digest of Technical Papers; Apr2024 Suppl 1, Vol. 55 Issue 1, p998-1001, 4p

مصطلحات موضوعية: SILICON oxide, INDIUM gallium zinc oxide, SILICON oxide films, THIN film transistors, FAILURE mode & effects analysis, FAILURE analysis

المؤلفون: Herrmann, Eric, Wang, Xi

المصدر: IEEE Transactions on Semiconductor Manufacturing; Feb2024, Vol. 37 Issue 1, p87-92, 6p

مصطلحات موضوعية: PLASMA-enhanced chemical vapor deposition, SILICON nitride films, ELECTRON beam lithography, SILICON oxide films, SILICON oxide, PLASMA etching, RAMAN scattering

المؤلفون: Fütterer, Laura^1,2 (AUTHOR), Beckmann, Clemens M.^1,3 (AUTHOR), Ihlemann, Jürgen¹ (AUTHOR) juergen.ihlemann@ifnano.de

المصدر: Applied Physics A: Materials Science & Processing. Feb2023, Vol. 129 Issue 2, p1-8. 8p. 1 Diagram, 4 Graphs.

مصطلحات موضوعية: *SILICON films, *SILICON oxide films, *DEFORMATIONS (Mechanics), *FUSED silica, *GLASS transition temperature, *EXCIMER lasers, *BOROSILICATES