المؤلفون: Herrmann, Eric¹ (AUTHOR) eherrm@udel.edu, Wang, Xi¹ (AUTHOR) wangxi@udel.edu

المصدر: IEEE Transactions on Semiconductor Manufacturing. Feb2024, Vol. 37 Issue 1, p87-92. 6p.

مصطلحات موضوعية: PLASMA-enhanced chemical vapor deposition, SILICON nitride films, ELECTRON beam lithography, SILICON oxide films, SILICON oxide, PLASMA etching, RAMAN scattering

المؤلفون: Lu, Feng¹ (AUTHOR), Zhang, Ting¹ (AUTHOR) 841944691@qq.com, Bai, Xu² (AUTHOR) baix@sut.edu.cn, Wu, Yuhou^1,3 (AUTHOR), Zheng, Tongxiang¹ (AUTHOR), Zhao, Zichen¹ (AUTHOR)

المصدر: Fullerenes, Nanotubes & Carbon Nanostructures. 2024, Vol. 32 Issue 6, p546-560. 15p.

مصطلحات موضوعية: *SILICON nitride films, *PHYSICAL vapor deposition, *SILICON nitride, *DIAMOND films, *CHEMICAL vapor deposition, *THERMAL conductivity

المؤلفون: Wu, Majiaqi^1,2 (AUTHOR), Yang, Xiaoni^1,2 (AUTHOR), Zhang, Chi^1,3 (AUTHOR), Jian, Maoliang¹ (AUTHOR), Yang, Lianqiao¹ (AUTHOR) yanglianqiao@i.shu.edu.cn

المصدر: Physica Status Solidi. A: Applications & Materials Science. May2024, Vol. 221 Issue 10, p1-8. 8p.

مصطلحات موضوعية: *SILICON nitride films, *SILICON nitride, *THIN films, *HYDROGENATED amorphous silicon, *PLASMA-enhanced chemical vapor deposition, *WATER vapor

المؤلفون: Huang, Wei¹ (AUTHOR), Wang, Junjun^1,2 (AUTHOR) junjunwang@wit.edu.cn, Xu, Qingfang¹ (AUTHOR), Yang, Meijun¹ (AUTHOR), Liu, Kai¹ (AUTHOR), Peng, Jian¹ (AUTHOR) jian.peng@whut.edu.cn, Wang, Chuanbin^1,3 (AUTHOR), Tu, Rong^1,3 (AUTHOR), Zhang, Song^1,3 (AUTHOR)

المصدر: Ceramics International. Apr2024, Vol. 50 Issue 8, p13439-13446. 8p.

مصطلحات موضوعية: *SILICON nitride films, *SILICON films, *CHEMICAL vapor deposition, *ANALYTICAL chemistry, *PROTECTIVE coatings, *PHASE diagrams

المؤلفون: Cao, Ethan¹ (AUTHOR), Cain, DaVante¹ (AUTHOR), Silva, Savannah¹ (AUTHOR), Siwy, Zuzanna S.^1,2,3 (AUTHOR) zsiwy@uci.edu

المصدر: Advanced Functional Materials. 3/11/2024, Vol. 34 Issue 11, p1-11. 11p.

مصطلحات موضوعية: *NANOPORES, *SILICON nitride films, *BIOMIMETIC materials, *BIOMIMETICS, *CHEMICAL properties

المؤلفون: Asghar, Muhammad¹ (AUTHOR) asgharqaui@gmail.com, Bashir, Muhammad Imran¹ (AUTHOR) mibashir786@gmail.com, Tayyab, Muhammad¹ (AUTHOR) mtayyab@phys.qau.edu.pk, Shafiq, Muhammad¹ (AUTHOR) mshafiq@qau.edu.pk, Naz, Muhammad Yasin² (AUTHOR) yasin603@yahoo.com, Ibrahim, Ahmed Ahmed³ (AUTHOR) ahabdalla@ksu.edu.sa, Shoaib, Muhammad⁴ (AUTHOR) 293muhammadshoaib@gmail.com

المصدر: AIP Advances. Mar2024, Vol. 14 Issue 3, p1-8. 8p.

مصطلحات موضوعية: *SILICON nitride films, *IRON, *LOW temperatures, *CRYSTAL optics, *OPTICAL films

المؤلفون: Lu, Ming¹ (AUTHOR) minglu@sjtu.edu.cn, Liu, Dongdong¹ (AUTHOR) sjtu_ldd@sjtu.edu.cn, Zhang, Chuan¹ (AUTHOR) zhangchuan@sjtu.edu.cn, Sun, Fanghong¹ (AUTHOR) sunfanghong@sjtu.edu.cn

المصدر: Ceramics International. Jan2024:Part A, Vol. 50 Issue 2, p2588-2599. 12p.

مصطلحات موضوعية: *DIAMOND films, *SILICON nitride films, *SILICON nitride, *DOPING agents (Chemistry), *WEAR resistance, *SURFACE finishing

المؤلفون: Nayak, Sanjay, Shanmugham, Sathish Kumar, Petrov, Ivan, Rosen, Johanna, Eklund, Per, Birch, Jens, le Febvrier, Arnaud

المصدر: Journal of Applied Physics; 10/7/2023, Vol. 134 Issue 13, p1-9, 9p

مصطلحات موضوعية: SILICON films, THIN films, SILICON nitride films, ZIRCONIUM, BORON isotopes, EPITAXY, DENSITY functional theory, POINT defects

المؤلفون: Berghuis, Wilhelmus J. H.¹ (AUTHOR) w.j.h.berghuis@tue.nl, Melskens, Jimmy¹ (AUTHOR), Macco, Bart¹ (AUTHOR), Theeuwes, Roel J.¹ (AUTHOR), Black, Lachlan E.² (AUTHOR), Verheijen, Marcel A.^1,3 (AUTHOR), Kessels, Wilhelmus M. M.¹ (AUTHOR) w.m.m.kessels@tue.nl

المصدر: Journal of Applied Physics. 10/7/2021, Vol. 130 Issue 13, p1-10. 10p.

مصطلحات موضوعية: *SURFACE passivation, *SILICON nitride films, *PLASMA-enhanced chemical vapor deposition, *ATOMIC layer deposition, *HYDROGENATED amorphous silicon, *GERMANIUM

المؤلفون: Tu, Rong^1,2,3 (AUTHOR), Liu, Zhen¹ (AUTHOR), Xu, Qingfang¹ (AUTHOR) xuqingfang@whut.edu.cn, Zhang, Song¹ (AUTHOR), Li, Qizhong¹ (AUTHOR), Zhang, Xian³ (AUTHOR), Kosinova, Marina L.⁴ (AUTHOR), Goto, Takashi^1,5 (AUTHOR)

المصدر: Journal of the European Ceramic Society. Sep2023, Vol. 43 Issue 12, p5214-5222. 9p.

مصطلحات موضوعية: *SILICON nitride films, *CHEMICAL vapor deposition, *SILICON nitride, *ELECTRICAL resistivity, *LASERS