المؤلفون: Kagerer, S., Zauner, L., Wojcik, T., Koloszvári, S., Kozák, Tomáš, Čapek, Jiří, Zeman, Petr, Riedl, H., Mayrhofer, P.H.

مصطلحات موضوعية: R-HiPIMS depozice, oxid hlinitý, oxidace terče, polymorfní struktury, R-HiPIMS deposition, Alumina, Target poisoning, Polymorph structures

وصف الملف: 10 s.; application/pdf

العلاقة: Surface and Coatings Technology; KAGERER, S. ZAUNER, L. WOJCIK, T. KOLOSZVÁRI, S. KOZÁK, T. ČAPEK, J. ZEMAN, P. RIEDL, H. MAYRHOFER, P. Reactive HiPIMS deposition of Al-oxide thin films using W-alloyed Al targets. Surface and Coatings Technology, 2021, roč. 422, č. 25 SEP 2021, s. "127467-1" - "127467-10". ISSN: 0257-8972; 2-s2.0-85110752168; http://hdl.handle.net/11025/45429Test; 685607200028

الإتاحة: https://doi.org/10.1016/j.surfcoat.2021.127467Test
http://hdl.handle.net/11025/45429Test

المؤلفون: Helmut Riedl, T. Wojcik, L. Zauner, Szilárd Kolozsvári, Jiří Čapek, Tomáš Kozák, S. Kagerer, P.H. Mayrhofer, Petr Zeman

المصدر: Surface and Coatings Technology. 422:127467

مصطلحات موضوعية: Materials science, Alumina, R-HiPIMS depozice, Analytical chemistry, Oxide, oxid hlinitý, Surfaces and Interfaces, General Chemistry, Partial pressure, Sputter deposition, Condensed Matter Physics, Polymorph structures, Surfaces, Coatings and Films, Amorphous solid, Target poisoning, chemistry.chemical_compound, chemistry, Physical vapor deposition, Materials Chemistry, polymorfní struktury, Deposition (phase transition), oxidace terče, R-HiPIMS deposition, High-power impulse magnetron sputtering, Thin film

وصف الملف: application/pdf

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::46639bedaac4a1d2d669ec5d3f03fc0eTest
https://doi.org/10.1016/j.surfcoat.2021.127467Test