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1دورية أكاديمية
المؤلفون: C. A. Bollinger, D. Grube, S. A. Lytle, E. P. Martin, J A. Shimer, H. R. Siddiqui,
In "proc Th Int, J. J. Hsieh, D. E. Ibbotson, J A. Mucha, N. Selamoglu, S. J. Pearton, U. K. Chakrabarti, E. Lane, A. P. Perley, C. R. Abernathy, W. S. Hobson, K. S. Jones المساهمون: The Pennsylvania State University CiteSeerX Archives
وصف الملف: application/pdf
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المؤلفون: N. Selamoglu, S.A. Lytle, Catherine Ann Fieber, Hongzong Chew, Graham William Hills, E.P. Martin
المصدر: Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference.
مصطلحات موضوعية: Materials science, Yield (engineering), business.industry, chemistry.chemical_element, Dielectric, Electromigration, Reliability (semiconductor), CMOS, chemistry, Aluminium, Chemical-mechanical planarization, Electronic engineering, Optoelectronics, business, Throughput (business)
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::3ff5b7a2baf8700769839a478742adfbTest
https://doi.org/10.1109/vmic.1989.78006Test -
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المؤلفون: N. Selamoglu, Michel J. Rossi, David M. Golden
المصدر: The Journal of Chemical Physics. 84:2400-2407
مصطلحات موضوعية: Sticking coefficient, chemistry, Yield (chemistry), Radical, Photodissociation, General Physics and Astronomy, chemistry.chemical_element, Physical and Theoretical Chemistry, Atmospheric temperature range, Silicon oxide, Photochemistry, Oxygen, Chemical reaction
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::ed35a6e34fffd3db894409e9defdeafbTest
https://doi.org/10.1063/1.450836Test -
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المؤلفون: Michel J. Rossi, N. Selamoglu, David M. Golden
المصدر: Chemical Physics Letters. 124:68-72
مصطلحات موضوعية: Excimer laser, Chemistry, medicine.medical_treatment, Radical, Photodissociation, Analytical chemistry, General Physics and Astronomy, Absolute rate, Photochemistry, Mass spectrometry, Co 2 laser, Homogeneous, medicine, Physical and Theoretical Chemistry, Recombination
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::1353a32ff58dc5e7fdb65a9d83ca20d5Test
https://doi.org/10.1016/0009-2614Test(86)85015-1 -
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المؤلفون: Dale E. Ibbotson, N. Selamoglu, J. A. Mucha, Daniel L. Flamm
المصدر: MRS Proceedings. 111
مصطلحات موضوعية: Reaction rate, Surface diffusion, Materials science, Silicon, chemistry, Etching, Monolayer, Inorganic chemistry, chemistry.chemical_element, Reactive-ion etching, Copper, Catalysis
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::f0c4ac67f1c96284b9130b9034cf0545Test
https://doi.org/10.1557/proc-111-397Test -
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المؤلفون: V. STAROV, N. SELAMOGLU, C. STEEL
المصدر: Chemischer Informationsdienst. 13
مصطلحات موضوعية: General Medicine
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::aa8a91414d259ca1ec8d7f119ec5d121Test
https://doi.org/10.1002/chin.198211046Test