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1دورية أكاديمية
المؤلفون: Dhanesh G. Kasi, Mees N. S. de Graaf, Paul A. Motreuil-Ragot, Jean-Phillipe M. S. Frimat, Michel D. Ferrari, Pasqualina M. Sarro, Massimo Mastrangeli, Arn M. J. M. van den Maagdenberg, Christine L. Mummery, Valeria V. Orlova
المصدر: Micromachines, Vol 13, Iss 1, p 49 (2021)
مصطلحات موضوعية: SU-8, photoresist, polydimethylsiloxane (PDMS), maskless photolithography, grayscale photolithography, backside exposure, Mechanical engineering and machinery, TJ1-1570
وصف الملف: electronic resource
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المؤلفون: Dhanesh G. Kasi, Mees N. S. de Graaf, Paul A. Motreuil-Ragot, Jean-Phillipe M. S. Frimat, Michel D. Ferrari, Pasqualina M. Sarro, Massimo Mastrangeli, Arn M. J. M. van den Maagdenberg, Christine L. Mummery, Valeria V. Orlova
المصدر: Micromachines, 13(1). MDPI
Micromachines, 13(1)
Micromachines; Volume 13; Issue 1; Pages: 49
Micromachines, Vol 13, Iss 49, p 49 (2022)
Micromachinesمصطلحات موضوعية: digital micromirror device (DMD), photoresist, maskless photolithography, Mechanical Engineering, grayscale photolithography, SU-8, polydimethylsiloxane (PDMS), backside exposure, low-cost microfabrication, PRIMO, organ-on-a-chip (OoC), Article, Control and Systems Engineering, TJ1-1570, Mechanical engineering and machinery, Electrical and Electronic Engineering
وصف الملف: application/pdf
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::93afd38f9c7a6c16a5cb5c41a24b24bfTest
http://hdl.handle.net/1887/3277778Test