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1تقرير
المؤلفون: Smith, Henry I., Mondol, Mark K., Goodberlet, James G., Bernshteyn, Alex, Ferrera, Juan, Carter, David J., Schweizer, Mark R., Daley, James M., Lim, Michael H. Y., Moon, Euclid E., Djohmehri, Ihsan, Savas, Timothy A., Carter, James M., Murphy, Edward R., Everett, Patrick N., Lee, Jawoong, Farhoud, Maya S., Fleming, Robert C., Jr., Schattenburg, Mark L., Ross, Caroline A., Youcef-Toumi, Kamal, Bae, Jungmok M., Hwang, M., Jackson, Keith M., Lee, Zachary K., Antoniadis, Dimitri A., Lochtefeld, Anthony, Sokolinski, Ilia, Chung, James E., Meinhold, Mitchell W., Berman, David B., Ashoori, Raymond C., Fan, Shanhui, Foresi, James S., Steinmeyer, Günter, Thoen, Erik R., Villeneuve, Pierre R., Ippen, Erich P., Joannopoulos, John D., Kimerling, Lionel C., Qi, Minghao, Damask, Jay N., Khan, Mohammed Jalal, Koontz, Elisabeth M., Murphy, Thomas E., Kolodziejski, Leslie A., Haus, Hermann A., van Beek, Joost, Hindle, P., Porter, Jeannie M., Prentiss, Jane D., Sisson, Robert D., Canizares, Claude R., Franke, Andrea E., Pflug, David, Akinwande, Akintunde I., Bozler, Carl, Rana, Farhan, Marley, Elisabeth A., Ram, Rajeev J.
مصطلحات موضوعية: Nanostructures Technology, Nanostructures Research, Nanostructures Applications, Scanning-Electron-Beam Lithography, Spatial-Phase-Locked Electron-Beam Lithography, X-Ray Nanolithography, Zone-Plate Based X-Ray Lithography, Deep-UV Projection Lithography, Improved Mask Technology for X-Ray Lithography, Robust, High-Precision Mask Alignment and X-ray Exposure System, Interferometric Lithography, Sub-100 nm Metrology Using Interferometrically Produced Fiducial Grids, Arrays of Nanomagnets for High-Density Information Storage, Design of Single-Mask 50 nm MOSFETs, Fabrication of Single-Mask 50 nm MOSFETs, CMOS Technology for 25 nm Channel Length, Fabrication of T-gate Devices Using X-ray Lithography, Single-Electron Transistor Research, One-Dimensional Photonic-Band-Gap Devices in SOI Waveguides, Three-dimensional Photonic Bandgap Structures, Design of an Integrated Channel-Dropping Filter in InP, Fabrication of an Integrated Channel-Dropping Filter in InP, Fabrication of an Integrated Optical Grating-Based Matched Filter for Fiber-Optic Communications, High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-ray Spectroscopy, Super-smooth X-ray Reflection Gratings, Transmission Gratings as UV-blocking Filters for Neutral Atom Imaging, Submicrometer-Period Transmission Gratings for X-ray Spectroscopy, Submicrometer-Period Transmission Gratings for X-ray Interferometry
وصف الملف: application/pdf
العلاقة: Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1997; Solid State Physics, Electronics and Optics; Quantum-Effect Devices; Nanostructures Technology, Research, and Applications; Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 140; RLE_PR_140_01_02s_04; http://hdl.handle.net/1721.1/57421Test
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2تقرير
المؤلفون: Smith, Henry I., Goodberlet, James G., Ferrera, Juan, Mondol, Mark K., Carter, David J., Carter, James M., Daley, James M., Lim, Michael H. Y., Moon, Euclid E., Schweizer, Mark R., Mao, Wendy, Murphy, Edward R., Yang, Isabel Y., Yuan, Jing, Everett, Patrick N., Farhoud, Maya S., Fleming, Robert C., Jr., Savas, Timothy A., Schattenburg, Mark L., Jackson, Keith M., Antoniadis, Dimitri A., Lochtefeld, Anthony, Chandrakasan, Anantha P., Meinhold, Mitchell W., Sokolinski, Ilia, Melloch, Michael R., Orlando, Terry P., Pepin, Anne, Berman, David B., Ashoori, Raymond C., Foresi, James S., Villeneuve, Pierre R., Joannopoulos, John D., Kimerling, Lionel C., Damask, Jay N., Murphy, Thomas E., Haus, Hermann A., Kolodziejski, Leslie A., Porter, Jeanne M., Prentiss, Jane D., Sisson, Robert D., van Beek, Joost, Canizares, Claude R., Franke, Andrea E.
مصطلحات موضوعية: Nanostructures, Technology, Research, and Applications, NanoStructures Laboratory, Scanning-Electron-Beam Lithography, Spatial-Phase-Locked Electron-Beam Lithography, X-Ray Nanolithography, Improved Mask Technology for X-Ray Lithography, High-Precision Mask Alignment with Immunity to Overlayers, High-Precision Gapping System with Immunity to Overlayers, Interferometric Lithography, High-Performance Sub-100 nm MOSFETs using X-ray Lithography, Back-gated CMOS on SOI Active Substrates, Fabrication of T-gate Devices Using X-ray Lithography, Coulomb Charging Effects in Semiconductor Nanostructures, Coulomb Charging Tunneling in Semiconductor Nanostructures, Fabrication Studies of Lateral Surface Superlattices in GaAs/AIGaAs Modulation Doped Field-Effect Transistors, Transport Studies of Lateral Surface Superlattices in GaAs/AIGaAs Modulation Doped Field-Effect Transistors, Single-Electron Transistor Research, One-Dimensional Photonic Band Gap Devices in SOI Waveguides, Fabrication of Grating-Based Optical Filters, Integrated Optical Grating-Based Matched Filters for Fiber-Optic Communications, High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-ray Spectroscopy, Submicrometer-Period Transmission Gratings for X-ray Spectroscopy, Submicrometer-Period Transmission Gratings for X-ray Interferometry, Submicrometer-Period Transmission Gratings for Atom-Beam Spectroscopy, Submicrometer-Period Transmission Gratings for Atom-Beam Interferometry, Super-smooth X-ray Reflection Gratings
وصف الملف: application/pdf
العلاقة: Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1996; Solid State Physics, Electronics and Optics; Quantum-Effect Devices; Nanostructures, Technology, Research, and Applications; Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 139; RLE_PR_139_01_02s_04; http://hdl.handle.net/1721.1/57366Test
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3تقرير
المؤلفون: Smith, Henry I., Silverman, Scott E., Ferrera, Juan, Carter, James M., Lim, Michael H. Y., Moon, Euclid E., Wong, Vincent V., Yang, Isabel Y., Burkhardt, Martin, Franke, Andrea E., Mondol, Mark K., Murphy, Edward, Everett, Patrick N., Fleming, Robert C., Jr., Savas, Timothy A., Schattenburg, Mark L., Shah, Satyen N., Thompson, Carl V., Yasaka, Anto, Jackson, Keith M., Antoniadis, Dimitri A., Meinhold, Mitchell W., Carter, David J., Sokolinski, Ilia, Melloch, Michael R., Orlando, Terry P., Pepin, Anne, Schweizer, Mark R., Berman, David B., Ashoori, Raymond C., Marley, Elisabeth A., Murphy, Thomas E., Kolodziejski, Leslie A., Damask, Jay N., Haus, Hermann A., Aucoin, Richard J., Canizares, Claude R., Porter, Jeanne M.
مصطلحات موضوعية: Nanostructures, Technology, Research, and Applications, Nanostructures Laboratory, Scanning Electron Beam Lithography, Spatial-Phase-Locked Electron-Beam Lithography, X-Ray Nanolithography, Improved Mask Technology for X-Ray Lithography, High-Precision Mask Alignment with Immunity to Overlayers, High-Precision Gapping System with Immunity to Overlayers, Interferometric Lithography, Ion-Beam Lithography, High-Performance, Self-aligned Sub-100 nm MOSFETs Using X-ray Lithography, Single-Gate SOI Devices, Dual-Gate SOI Devices, Fabrication of T-gate Devices using X-ray Lithography, Coulomb Charging Effects in Semiconductor Nanostructures, Coulomb Charging Tunneling in Semiconductor Nanostructures, Fabrication Studies of Lateral Surface Superlattices in GaAs/AIGaAs Modulation Doped Field-Effect Transistors, Transport Studies of Lateral Surface Superlattices in GaAs/AIGaAs Modulation Doped Field-Effect Transistors, Single-Electron Transistor Research, Distributed-Feedback Lasers Fabricated by X-Ray Lithography, Fabrication of Integrated Quarter-Wave Shifted Distributed Bragg Gratings for Wavelength Division Multiplexing Applications, Design of a Grating-Based Matched Filter for Optical Communications, High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-ray Spectroscopy, Submicrometer-Period Transmission Gratings for X-ray Spectroscopy, Submicrometer-Period Transmission Gratings for X-ray Interferometry
وصف الملف: application/pdf
العلاقة: Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1995; Solid State Physics, Electronics and Optics; Quantum-Effect Devices; Nanostructures, Technology, Research, and Applications; Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 138; RLE_PR_138_01_02s_05; http://hdl.handle.net/1721.1/57337Test
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4تقرير
المؤلفون: Smith, Henry I., Silverman, Scott E., Ferrera, Juan, Carter, James M., Wong, Vincent V., Gupta, Nitin, Hector, Scott D., Owen, Gabrielle M., Schattenburg, Mark L., Yang, Isabel Y., Burkhardt, Martin, Li, Huiying, Mondol, Mark K., Sission, Robert D., Moon, Euclid E., Aucoin, Richard J., Shah, Satyen N., Yasaka, Anto, Antoniadis, Dimitri A., Chu, William, Hu, Hang, Rhee, Kee, Su, Lisa T-F., Carter, David J., Kumar, Arvind, Melloch, Michael R., Orlando, Terry P., del Alamo, Jesús, Eugster, Cristopher C., Hugunin, James J., Damask, Jay N., Haus, Hermann A., Kolodziejski, Leslie A., Choi, Woo-Young, Fonstad, Clifton G., Jr., Moolji, Akbar A., Lew, Julie C., Porter, Jeanne M., Canizares, Claude R., Fleming, Robert C., Jr., Donovan, Sean M., Ismail, Khalid, Thompson, Carl V.
مصطلحات موضوعية: Nanostructures Technology, Nanostructures Research, Nanostructures Applications, NanoStructures Laboratory, Scanning Electron-Beam Lithography Facility, Spatial-Phase-Locked Electron-Beam Lithography, X-Ray Nanolithography, Improved Mask Technology for X-Ray Lithography, High Precision Mask Alignment System, Optimization of Synchrotron-Based X-ray Lithography, Achromatic Holographic Lithography, Ion Beam Lithography, High Performance Self-aligned Sub-100 nm MOSFETs Using X-ray Lithography, Fabrication of T-gate Devices Using X-ray Lithography, Coulomb Charging Effects in Semiconductor Nanostructures, Coulomb Charging Tunneling in Semiconductor Nanostructures, Dual Electron Waveguide Device Fabricated Using X-ray Lithography, Novel Mesoscopic Superconducting Devices, Channel-Dropping Filters Fabricated Using X-ray Lithography, Ridge-Grating Distributed-Feedback Lasers Fabricated by X-ray Lithography, Fabrication of Sub-micron MSM Photodiodes by X-ray Lithography, Submicrometer-Period Transmission Gratings for X-ray Spectroscopy, Submicrometer-Period Transmission Gratings for X-ray Interferometry, Submicrometer-Period Transmission Gratings for Atom-Beam Spectroscopy, Submicrometer-Period Transmission Gratings for Atom-Beam Interferometry, High-Dispersion, High Efficiency Transmission Gratings for Astrophysical X-ray Spectroscopy, GaAs Epitaxy on Sawtooth-Patterned Silicon
وصف الملف: application/pdf
العلاقة: Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1993; Solid State Physics, Electronics and Optics; Quantum-Effect Devices; Nanostructures Technology, Research, and Applications; Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 136; RLE_PR_136_01_02s_04; http://hdl.handle.net/1721.1/57269Test
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5تقرير
المؤلفون: Smith, Henry I., Aucoin, Richard J., Carter, James M., Chu, William, Fleming, Robert C., Jr., Ghanbari, Reza A., Gupta, Nitin, Hector, Scott D., Li, Huiying, Moel, Alberto M., Schattenburg, Mark L., Wong, Vincent V., Ferrera, Juan, Lim, Michael H. Y., Mondol, Mark K., Frankel, Robert, Shah, Satyen N., Antoniadis, Dimitri A., Chung, James E., Fang, Hao, Hu, Hang, Eugster, Cristopher C., Kumar, Arvind, Orlando, Terry P., Rooks, Michael J., Burkhardt, Martin, del Alamo, Jesús A., Chou, Michael T., Shayegan, M., Sang-hun, Song, Tsui, Daniel, Yee, Kenneth, Zhao, Yang, Choi, Woo-Young, Fonstad, Clifton G., Jr., Damask, Jay N., Haus, Hermann A., Kolodziejski, Leslie A., Chu, Jack, Graybeal, John M., Meyerson, Bernard S., Rittenhouse, George E., Lew, Julie C., Canizares, Claude R., Ismail, Khalid, Karam, Nasser
مصطلحات موضوعية: Submicron Structures Technology, Submicron Structures Research, Nanometer Structures Technology, Nanometer Structures Research, Submicron Structures Laboratory, X-Ray Nanolithography, Improved Mask Technology for X-Ray Lithography, Improved Scanning Electron Beam Lithography, High-Precision Mask Alignment Scheme, Achromatic Holographic Lithography, Fabrication of T-gate Devices using X-ray Lithography, Tenth-micron MOSFET Device Technology, Coulomb Charging Effects in Semiconductor Nanostructures, Quasi-One-Dimensional Wires in GaAs/AIGaAs Modulation Doped Field-Effect Transistors, Planar-Resonant-Tunneling Field-Effect Transistors (PRESTFET), Dual Electron Waveguide Device Fabricated Using X-ray Lithography, Far-Infrared Spectroscopy of Arrays of Quantum Dots, Far-Infrared Spectroscopy of Arrays of Quantum Wires, Ridge-Grating Distributed-Feedback Lasers Fabricated by X-Ray Lithography, Channel-Dropping Filters Fabricated by X-Ray Lithography, Novel Superconducting Tunneling Structures, Submicrometer-Period Transmission Gratings for X-ray Spectroscopy, Submicrometer-Period Transmission Gratings for X-ray Interferometry, Submicrometer-Period Transmission Gratings for Atom-Beam Spectroscopy, Submicrometer-Period Transmission Gratings for Atom-Beam Interferometry, High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-ray Spectroscopy, Submicron-Thickness X-ray Window Technology, GaAs Epitaxy on Sawtooth-Patterned Silicon
وصف الملف: application/pdf
العلاقة: Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1992; Solid State Physics, Electronics and Optics; Quantum-Effect Devices; Submicron and Nanometer Structures Technology and Research; Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 135; RLE_PR_135_01_02s_04; http://hdl.handle.net/1721.1/57219Test
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6تقرير
المؤلفون: Smith, Henry I., Burkhardt, Martin, Carter, James M., Chu, William, Early, Kathleen R., Ghanbari, Reza A., Hector, Scott D., Ku, Yao-Ching, Moel, Alberto M., Rittenhouse, George E., Schattenburg, Mark L., Wong, Vincent V., Yen, Anthony T., Ferrera, Juan, Mondol, Mark K., Ng, Lee-Peng, Tsai, Flora S., Yunus, Sabah, Antoniadis, Dimitri A., Chung, James E., Fang, Hao, Hu, Hang, Su, Lisa T-F., Kastner, Marc A., Kumar, Arvind, Orlando, Terry P., del Alamo, Jesús A., Eugster, Cristopher C., Moon, Euclid E., Shayegan, M., Tsui, Daniel, Zhao, Yang, Chou, Michael T., Choi, Woo-Young, Damask, Jay N., Fonstad, Clifton G., Jr., Haus, Hermann A., Kolodziejski, Leslie A., Graybeal, John M., Meyerson, Bernard S., Olster, Daniel B., Canizares, Claude R., Fleming, Robert C., Jr., Nenonen, Seppo, Bristowe, Paul D., Carel, Roland, Floro, Jerrold A., Thompson, Carl V., Yee, Kenneth, Ismail, Khalid, Karam, Nasser
مصطلحات موضوعية: Submicron Structures Technology, Submicron Structures Research, Nanometer Structures Technology, Nanometer Structures Research, Submicron Structures Laboratory, Microfabrication at Linewidths of 100 nm and Below, Improved Mask Technology for X-Ray Lithography, Electron Transport in Si MOSFETs with Deep-Submicron Channel Lengths, Coulomb Charging in Ultrasmall Semiconductor Devices, Quasi-One-Dimensional Wires in GaAs/AIGaAs Modulation Doped Field-Effect Transistors, Superlattice Formation in GaAs/AIGaAs Modulation Doped Field-Effect Transistors, GaAs Electron Waveguide Devices Fabricated by X-Ray Lithography, Arrays of Field-Effect-Induced Quantum Dots, Planar-Resonant-Tunneling Field-Effect Transistors (PRESTFET), Fabrication of Distributed-Feedback Lasers, Fabrication of Channel-Dropping Filters, Novel Superconducting Tunneling Structures, Submicrometer-Period Transmission Gratings for X-Ray Spectroscopy, Submicrometer-Period Transmission Gratings for X-Ray Interferometry, Submicrometer-Period Transmission Gratings for Atom-Beam Spectroscopy, Submicrometer-Period Transmission Gratings for Atom-Beam Interferometry, High-Dispersion, High Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy, Submicron-Thickness X-Ray Window Technology, Epitaxy via Surface-Energy-Driven Grain Growth, GaAs Epitaxy on Sawtooth-patterned Si
وصف الملف: application/pdf
العلاقة: Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1991; Solid State Physics, Electronics and Optics; Quantum-Effect Devices; Submicron and Nanometer Structures Technology and Research; Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 134; RLE_PR_134_01_02s_04; http://hdl.handle.net/1721.1/57185Test
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7تقرير
المؤلفون: Smith, Henry I., Burkhardt, Martin, Carter, James M., Chu, William, Early, Kathleen R., Ghanbari, Reza A., Ku, Yao-Ching, Moel, Alberto M., Schattenburg, Mark L., The, Siang-Chun, Yen, Anthony T., Gutierrez, JoAnne M., Lu, Kenneth P., Ng, Lee-Peng, Salyani, Shahir R., Su, Lisa T-F., Tsai, Flora S., Wey, Lead, Antoniadis, Dimitri A., Carlin, Gregory A., Fang, Hao, Hu, Hang, Field, Stuart B., Kastner, Marc A., Park, Samuel L., Scott-Thomas, John H. F., Bagwell, Phillip F., Orlando, Terry P., del Alamo, Jesus A., Ismail, Khalid, Yee, Kenneth, Evans, Keith, Liu, C. T., Shayegan, M., Smith, T. P., Tsui, Daniel, Zhao, Yang, Canizares, Claude R., Floro, Jerrold A., Thompson, Carl V.
مصطلحات موضوعية: Submicron Structures Technology, Submicron Structures Research, Submicron Structures Laboratory, Microfabrication at Linewidths of 100 nm and Below, Improved Mask Technology for X-Ray Lithography, Electron Transport in Si MOSFETs with Deep-Submicron Channel Lengths, Electronic Conduction in One-Dimensional Semiconductor Devices, Lateral-Surface-Superlattice in Si, Quantum Wire Arrays in Si, Surface Superlattice Formation in GaAs/GaAIAs Modulation Doped Field-Effect Transistors, One-Dimensional Subbands in GaAs/AIGaAs Quantum Wires, Mobility Modulation in GaAs/AIGaAs Quantum Wires, Arrays of Field-Effect-Induced Quantum Dots, Planar-Resonant-Tunneling Field-Effect Transistors (PRESTFET), Submicrometer-Period Transmission Gratings for X-Ray Spectroscopy, Submicrometer-Period Transmission Gratings for X-Ray Interferometry, Submicrometer-Period Transmission Gratings for Atom-Beam Spectroscopy, Submicrometer-Period Transmission Gratings for Atom-Beam Interferometry, High-Dispersion, High Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy, Epitaxy via Surface-Energy-Driven Grain Growth, Publications
وصف الملف: application/pdf
العلاقة: Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1990; Solid State Physics, Electronics and Optics; Materials and Fabrication; Submicron Structures Technology and Research; Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 133; RLE_PR_133_01_01s_01; http://hdl.handle.net/1721.1/57151Test
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8تقرير
المؤلفون: Anderson, Erik H., Burkhardt, Martin, Carter, James M., Chu, William, Early, Kathleen R., Ku, Yao-Ching, Quek, Hui Meng, Moel, Alberto, Schattenburg, Mark L., Smith, Henry I., Yen, Anthony T., Plotnik, Irving, Kawata, Hiroaki, Antoniadis, Dimitri A., Field, Stuart B., Kastner, Marc A., Licini, Jerome C., Meirav, Udi, Park, Samuel L., Scott-Thomas, John H. F., Bagwell, Phillip F., Orlando, Terry P., Ismail, Khalid, Meyer, Paul, Shahidi, Ghavam G., The, Siang-Chun, Ajuria, Sergio, Floro, Jerrold A., Thompson, Carl V., III, Palmer, Joyce E., Canizares, Claude R.
مصطلحات موضوعية: Submicron Structures Technology, Submicron Structures Research, Submicron Structures Laboratory, Microfabrication at Linewidths of 100nm and Below, Improved Mask Technology For X-Ray Lithography, Optical Projection Lithography Using Lenses of High Numerical Aperture, Electronic Conduction In One-Dimensional Semiconductor Devices, Surface Superlattice Formation In Silicon Inversion Layers Using 0.2μm-Period Grating-Gate Field-Effect Transistors, Surface Superlattice Formation in GaAs/GaAIAs Modulation Doped Field-Effect Transistors, One-Dimensional Subbands in GaAs/AIGaAs Quantum Wires, Mobility Modulation in GaAs/AIGaAs Quantum Wires, Electron Transport In Si MOSFETs With Deep-Submicron Channel Lengths, Crystalline Films On Amorphous Substrates, Epitaxy via Surface-Energy-Driven Grain Growth, Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy, Submicrometer-Period Gold Transmission Gratings for Atom-Beam Interferometry, High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy, Soft X-Ray Interferometer Gratings
وصف الملف: application/pdf
العلاقة: Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1988; Solid State Physics, Electronics And Optics; Materials and Fabrication; Submicron Structures Technology and Research; Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 131; RLE_PR_131_01_01s_01; http://hdl.handle.net/1721.1/57073Test
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9تقرير
المؤلفون: Anderson, Erik H., Chu, William, Plotnik, Irving, Schattenburg, Mark L., Smith, Henry I., Yen, Anthony T., Warren, Alan C., Antoniadis, Dimitri A., Orlando, Terry P., Melngailis, John, Chou, Stephen Y., Shahidi, Ghavam G., Licini, Jerome C., Scott-Thomas, John H. F., Park, Samuel L., Kastner, Marc A., Atwater, Harry A., Garrison, Stephen M., Palmer, Joyce E., Quek, Hui Meng, Wong, Chee C., Thompson, Carl V., Canizaares, Claude C., Stein, Josephine A., Summa, Deborah A., Paynter, Henry M., Rajchman, Jan A., Tse, Ming K.
مصطلحات موضوعية: Submicron Structures Technology, Submicron Structures Research, Submicron Structures Laboratory, Microfabrication at Linewidths of 0.1 μm and Below, Corrugated Gate MOS Structures, MOSFET's in Si with Deep-Submicron Channel Lengths, Electronic Conduction in Submicron Silicon Inversion Layers, Crystalline Films on Amorphous Substrates, Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy, High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy, Soft X-Ray Interferometer Gratings, Switchable Zero Order Diffraction Grating Light Valves
وصف الملف: application/pdf
العلاقة: Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1986; Submicron Structures Technology and Research; Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 128; RLE_PR_128_01; http://hdl.handle.net/1721.1/56948Test
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10تقرير
المؤلفون: Anderson, Erik H., Carter, James M., Chu, William, Quek, Hui Meng, Plotnik, Irving, Schattenburg, Mark L., Yen, Anthony T., Smith, Henry I., Ku, Yao-C., Field, S. B., Licini, Jerome C., Meirav, Udi, Park, Samuel L., Scott-Thomas, John H. F., Antoniadis, Dimitri A., Kastner, Marc A., Bagwell, Phillip F., Orlando, Terry P., Ismail, Khalid, Shahidi, Ghavam G., Ajuria, Sergio, Atwater, Harry A., Floro, Jerrold A., Thompson, Carl V., Palmer, Joyce E., Canizares, Claude R.
مصطلحات موضوعية: Submicron Structures Technology and Research, Submicron Structures Laboratory, Microfabrication at Linewidths of 100nm and Below, Improved Mask Technology For X-Ray Lithography, Theoretical Analysis Of The Lithography Process, Electronic Conduction In One-Dimensional Semiconductor Devices, Surface Superlattice Formation In Silicon Inversion Layers Using 200 μm Period Grating-Gate Field-Effect Transistors, Surface Superlattice Formation in GaAs/GaAIAs Modulation Doped Field-Effect Transistors, Investigation of One-Dimensional Conductivity in Multiple, Parallel Inversion Lines, Electron Transport In MOSFET's In Si With Deep-Submicron Channel Lengths, Crystalline Films On Amorphous Substrates, Ion-Bombardment-Enhanced Grain Growth In Thin Films, Epitaxy via Surface-Energy-Driven Grain Growth, Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy, High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy, Soft X-Ray Interferometer Gratings
وصف الملف: application/pdf
العلاقة: Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1987; Submicron Structures Technology and Research; Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 130; RLE_PR_130_01; http://hdl.handle.net/1721.1/57036Test