-
1دورية أكاديمية
المؤلفون: Mostafa, Y., Behnke, L., Engels, D. J., Bouza, Z., Sheil, J., Ubachs, W., Versolato, O. O.
المصدر: Mostafa , Y , Behnke , L , Engels , D J , Bouza , Z , Sheil , J , Ubachs , W & Versolato , O O 2023 , ' Production of 13.5 nm light with 5% conversion efficiency from 2 μ m laser-driven tin microdroplet plasma ' , Applied Physics Letters , vol. 123 , no. 23 , 234101 . https://doi.org/10.1063/5.0174149Test
الإتاحة: https://doi.org/10.1063/5.0174149Test
https://research.vu.nl/en/publications/a58e80b3-7697-4c93-bb1e-03d73c941002Test
https://hdl.handle.net/1871.1/a58e80b3-7697-4c93-bb1e-03d73c941002Test -
2دورية أكاديمية
المؤلفون: Engels, D. J.1,2,3 (AUTHOR) d.engels@arcnl.nl, Meijer, R. A.1,2 (AUTHOR), Schubert, H. K.1,2 (AUTHOR), van der Zande, W. J.1 (AUTHOR), Ubachs, W.1,2 (AUTHOR), Versolato, O. O.1,2 (AUTHOR)
المصدر: Applied Physics Letters. 12/18/2023, Vol. 123 Issue 25, p1-6. 6p.
مصطلحات موضوعية: *LASER plasmas, *THIN films, *SPECTROSCOPIC imaging, *VAPORIZATION, *ATOMS, *ELECTRON density, *PLASMA sources
-
3دورية أكاديمية
المؤلفون: Mostafa, Y., Behnke, L., Engels, D. J., Bouza, Z., Sheil, J., Ubachs, W., Versolato, O. O.
المصدر: Applied Physics Letters; 12/4/2023, Vol. 123 Issue 23, p1-6, 6p
مصطلحات موضوعية: LASER plasmas, EXTREME ultraviolet lithography, TIN, SEMICONDUCTOR devices, SEMICONDUCTOR manufacturing
