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1تقرير
المؤلفون: Anderson, Erik H., Chu, William, Plotnik, Irving, Schattenburg, Mark L., Smith, Henry I., Yen, Anthony T., Warren, Alan C., Antoniadis, Dimitri A., Orlando, Terry P., Melngailis, John, Chou, Stephen Y., Shahidi, Ghavam G., Licini, Jerome C., Scott-Thomas, John H. F., Park, Samuel L., Kastner, Marc A., Atwater, Harry A., Garrison, Stephen M., Palmer, Joyce E., Quek, Hui Meng, Wong, Chee C., Thompson, Carl V., Canizaares, Claude C., Stein, Josephine A., Summa, Deborah A., Paynter, Henry M., Rajchman, Jan A., Tse, Ming K.
مصطلحات موضوعية: Submicron Structures Technology, Submicron Structures Research, Submicron Structures Laboratory, Microfabrication at Linewidths of 0.1 μm and Below, Corrugated Gate MOS Structures, MOSFET's in Si with Deep-Submicron Channel Lengths, Electronic Conduction in Submicron Silicon Inversion Layers, Crystalline Films on Amorphous Substrates, Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy, High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy, Soft X-Ray Interferometer Gratings, Switchable Zero Order Diffraction Grating Light Valves
وصف الملف: application/pdf
العلاقة: Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1986; Submicron Structures Technology and Research; Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 128; RLE_PR_128_01; http://hdl.handle.net/1721.1/56948Test
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2تقرير
المؤلفون: Smith, Henry I., Hawryluk, Andrew M., Melngailis, John J., Schatterbug, Mark L., Ceglio, Natale M., Jr., Price, R. H., Tsumita, Norikazu, Anderson, Erik H., Horwitz, Christopher M., Dana, Stephane S., Atwater, Harry A., Bezjian, Krikor, Keavney, Christopher J., Fonstad, Clifton G., Markunas, Robert J., Haus, Hermann A., Islam, Muhammed N., Garber, Edward M., Warren, Alan C., Antoniadis, Dimitri A., Kwasnick, Robert F., Kastner, Marc A.
مصطلحات موضوعية: Submicron Structures Fabrication and Research, Submicron-Period Gold Transmission Gratings for Soft X-ray Spectroscopy, Spatial-Period-Division, Fabrication of X-ray Masks Using Anisotropic Etching of (110) SI and Shadowing Techniques, Reactive Sputter Etching of Si, SiO₂, Cr, and Al with Gas Mixtures Based on CF₄, Cl₂, and SiCl₄, Graphoepitaxy by CVD, Solution Growth, Graphoepitaxy for Solar Cells, Liquid Phase Epitaxy of InP, Filters Based on the Coupling of Surface Acoustic Waves in Gratings to Bulk Plate Modes, Fabrication of Corrugated-Gate MOS Structures, Narrow Inversion Layers in Silicon, Collaborative Projects
وصف الملف: application/pdf
العلاقة: Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1982; Submicron Structures Fabrication and Research; Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 124; RLE_PR_124_17; http://hdl.handle.net/1721.1/56844Test
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3تقرير
المؤلفون: Anderson, Erik H., Plotnik, Irving, Schattenburg, Mark L., Melngailis, John, Smith, Henry I., Kwasnick, Robert F., Licini, Jerome C., Kastner, Marc A., Lee, Patrick A., Warren, Alan C., Antoniadis, Dimitri A., Chou, Stephen Y., Shahidi, Ghavam G., Ippen, Erich P., Palmer, Joyce E., Wong, Chee C., Yonehara, Takao, Garrison, Stephen M., Atwater, Harry A., Thompson, Carl V., Schott, Stephen C., Canizares, Claude R., Stein, Josephine A., Summa, Deborah A., Rajchman, Jan A., Paynter, Henry M., Chen, Dong-Pei, Haus, Hermann A.
مصطلحات موضوعية: Submicron Structures Technology, Submicron Structures Research, Submicron Structures Laboratory, Microfabrication at Linewidths of 0.1 μm and Below, Electronic Conduction in Ultra-Narrow Silicon Inversion Layers, Corrugated Gate MOS Structures, Submicron FET's in Si, Submicron-Gap High-Mobility Silicon Picosecond Photodetectors, Graphoepitaxy of Si, Graphoepitaxy of Ge, Graphoepitaxy of Model Materials, Zone-Melting Recrystallization of Si for Solar Cells, Integration of Si and Ill-V Materials, Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy, High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy, Display Based on Switchable Zero Order Diffraction Grating Light Valves, Surface Acoustic Wave Propagation in Gratings, Near IR Grating Polarizers
وصف الملف: application/pdf
العلاقة: Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1985; Submicron Structures Technology and Research; Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 127; RLE_PR_127_01; http://hdl.handle.net/1721.1/56933Test
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4تقرير
المؤلفون: Anderson, Erik H., Hawryluk, Andrew M., Kwasnick, Robert F., Warren, Alan C., Melngailis, John, Smith, Henry I., Horwitz, Christopher M., Kastner, Marc A., Antoniadis, Dimitri A., Dana, Stephane S., Thompson, Carl V., Atwater, Harry A., Keavney, Christopher J., Fonstad, Clifton G., Schattenburg, Mark L., Ceglio, Natale M., Jr., Canizares, Claude R., Stein, Josephine A., Rajchman, Jan A., Paynter, Henry M., Chen, Dong-Pei, Haus, Hermann A.
مصطلحات موضوعية: Submicron Structures Fabrication, Submicron Structures Research, Submicron Structures Lab, Microstructure Fabrication at Linewidths of 0.1 μm and Below, Reactive Sputter Etching Studies, Electronic Conduction in Ultra-Narrow Silicon Inversion Layers, Corrugated-Gate MOS Structures, Graphoepitaxy of Si Materials, Graphoepitaxy of Model Materials, Zone Melting Recrystallization of Si for Solar Cells, Zone Melting Recrystallization of InSb and InP, Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy, Zone Plates for X-Ray Spectroscopy, Submicrometer-Period Gold Transmission Gratings for X-Ray Microscopy, Zone Plates for X-Ray Microscopy, High Dispersion, High Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy, Switchable Zero-Order Diffraction Gratings as Light Valves, Filters Based on Conversion of Surface Acoustic Waves to Bulk Plate Modes in Gratings, Collaborative Projects
وصف الملف: application/pdf
العلاقة: Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1983; Submicron Structures Fabrication and Research; Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 125; RLE_PR_125_18; http://hdl.handle.net/1721.1/56874Test
