المؤلفون: Heras, Irene, Guillén Guillén, Elena, Krause, Matthias, Wenisch, Robert, Escobar-Galindo, Ramón, Endrino, José Luis

المساهمون: Universidad de Sevilla. Departamento de Física Aplicada I

مصطلحات موضوعية: Thin films, optical constants, cluster tool, high temperature applications, thermal degradation, real time spectroscopic ellipsometry, ion beam analysis, Raman spectroscopy

العلاقة: 3rd International Conference in Through-life Engineering Services (TESConf 2014) (2014), pp. 271-276.; https://www.sciencedirect.com/science/article/pii/S2212827114008087Test; https://idus.us.es/handle//11441/147232Test

الإتاحة: https://idus.us.es/handle//11441/147232Test

المؤلفون: Jipeng Wang, Hesuan Hu, Chunrong Pan, Liang Li

المصدر: IEEE Access, Vol 9, Pp 50093-50105 (2021)

مصطلحات موضوعية: Cluster tool, semiconductor manufacturing, wafer fabrication, scheduling, transient process, wafer revisiting, Electrical engineering. Electronics. Nuclear engineering, TK1-9971

وصف الملف: electronic resource

العلاقة: https://ieeexplore.ieee.org/document/9389780Test/; https://doaj.org/toc/2169-3536Test

الوصول الحر: https://doaj.org/article/94097b95d06d4f24a4c953625d7f4fcbTest

المؤلفون: Yanjun Lu, Yan Qiao, Chunrong Pan, Yufeng Chen, Naiqi Wu, Zhiwu Li, Bin Liu

المصدر: IEEE Access, Vol 9, Pp 70868-70883 (2021)

مصطلحات موضوعية: Cluster tool, Petri nets, semiconductor manufacturing, wafer fabrication, Electrical engineering. Electronics. Nuclear engineering, TK1-9971

وصف الملف: electronic resource

العلاقة: https://ieeexplore.ieee.org/document/9422735Test/; https://doaj.org/toc/2169-3536Test

الوصول الحر: https://doaj.org/article/25779f8f2ed2476a9062d97c815920d1Test

المؤلفون: Youngsoo Kim, Gunwoo Lee, Jongpil Jeong

المصدر: Applied Sciences; Volume 12; Issue 15; Pages: 7519

مصطلحات موضوعية: cluster tool, semiconductor manufacturing, throughput optimization, scheduling: ML-based data analysis, throughput prediction

جغرافية الموضوع: agris

وصف الملف: application/pdf

العلاقة: Computing and Artificial Intelligence; https://dx.doi.org/10.3390/app12157519Test

الإتاحة: https://doi.org/10.3390/app12157519Test

المؤلفون: Ying-Mei Tu

المصدر: Mathematics; Volume 9; Issue 9; Pages: 1029

مصطلحات موضوعية: wafer fabrication, cluster tool, short term scheduling, dynamic cycle time

وصف الملف: application/pdf

العلاقة: Engineering Mathematics; https://dx.doi.org/10.3390/math9091029Test

الإتاحة: https://doi.org/10.3390/math9091029Test

المؤلفون: Wenisch, R., Lungwitz, F., Hanf, D., Heller, R., Zscharschuch, J., Hübner, R., von Borany, J., Abrasonis, G., Gemming, S., Escobar-Galindo, R., Krause, M.

مصطلحات موضوعية: Cluster tool, thin films, in situ, high temperature, Rutherford backscattering, Raman spectroscopy, ellipsometry, metal-induced crystallization

الإتاحة: https://hzdr.qucosa.de/id/qucosa%3A33926Test
https://hzdr.qucosa.de/api/qucosa%3A33926/attachment/ATT-0Test/

المؤلفون: Qinghua Zhu, Naiqi Wu, Yan Qiao, Mengchu Zhou

المصدر: IEEE Access, Vol 4, Pp 2096-2109 (2016)

مصطلحات موضوعية: Cluster tool, Petri net (PN), Scheduling, Semiconductor manufacturing, Electrical engineering. Electronics. Nuclear engineering, TK1-9971

وصف الملف: electronic resource

العلاقة: https://ieeexplore.ieee.org/document/7445820Test/; https://doaj.org/toc/2169-3536Test

الوصول الحر: https://doaj.org/article/f8735fc762474f02bbb2e516bdeabb3aTest

المؤلفون: Qinghua Zhu, Bin Li, Yan Hou, Hongpeng Li, Naiqi Wu

مصطلحات موضوعية: Cluster tool, optimization, scheduling

العلاقة: IEEE/CAA Journal of Automatica Sinica; http://ir.ia.ac.cn/handle/173211/52335Test

الإتاحة: https://doi.org/10.1109/JAS.2023.123189Test
http://ir.ia.ac.cn/handle/173211/52335Test

المؤلفون: Girka Oleksii, Bizyukov Alexander, Bizyukov Ivan, Gutkin Michael, Mishin Sergei

المصدر: Nukleonika, Vol 60, Iss 2, Pp 327-330 (2015)

مصطلحات موضوعية: falcon, ion sourcem, surface wave, cluster tool, Science

وصف الملف: electronic resource

العلاقة: https://doaj.org/toc/0029-5922Test

الوصول الحر: https://doaj.org/article/08bab5e753984141b3338e8cbefca806Test

المؤلفون: Yang, Fajun, Wu, Naiqi, Qiao, Yan, Su, Rong

المساهمون: School of Electrical and Electronic Engineering

مصطلحات موضوعية: Engineering::Electrical and electronic engineering, Multi-cluster Tool, Petri Nets

وصف الملف: application/pdf

العلاقة: IEEE/CAA Journal of Automatica Sinica; Yang, F., Wu, N., Qiao, Y., & Su, R. (2018). Polynomial approach to optimal one-wafer cyclic scheduling of treelike hybrid multi-cluster tools via Petri nets. IEEE/CAA Journal of Automatica Sinica, 5(1), 270-280. doi:10.1109/jas.2017.7510772; https://hdl.handle.net/10356/141782Test; 50; 270; 280

الإتاحة: https://doi.org/10.1109/jas.2017.7510772Test
https://hdl.handle.net/10356/141782Test