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المؤلفون: Nicolas Wälchli, Elisabeth Kampshoff, Klaus Kern, Alexander Menck
المصدر: Surface Science. 382:L705-L712
مصطلحات موضوعية: Amorphous silicon, Materials science, Silicon, Diffusion, Nucleation, chemistry.chemical_element, Surfaces and Interfaces, Condensed Matter Physics, Electron beam physical vapor deposition, Surfaces, Coatings and Films, law.invention, Crystallography, chemistry.chemical_compound, chemistry, Chemical physics, law, Silicide, Materials Chemistry, Scanning tunneling microscope, Deposition (law)
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::5e65605b4888304279ccf203530107f3Test
https://doi.org/10.1016/s0039-6028Test(97)00137-4 -
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المؤلفون: Elisabeth Kampshoff, Nicolas Waelchli, Klaus Kern, Alexander Menck
المصدر: Surface Science. 360:55-60
مصطلحات موضوعية: Hydrogen, Chemistry, Analytical chemistry, chemistry.chemical_element, Surfaces and Interfaces, Partial pressure, Condensed Matter Physics, Surfaces, Coatings and Films, law.invention, Crystallography, Adsorption, Transition metal, law, Phase (matter), Materials Chemistry, Scanning tunneling microscope, Surface reconstruction, Palladium
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::60c6f4db6abd8efddd264cbb8fabf9b4Test
https://doi.org/10.1016/0039-6028Test(96)00653-x -
3
المؤلفون: Martin Dr. Roß-Meßemer, Timo Möller, Frank Höller, Alexander Menck
المصدر: Functional Materials
مصطلحات موضوعية: Engineering, Optics, business.industry, business
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::4feb3a6c6f60bcf6e2de8c1a34d280d0Test
https://doi.org/10.1002/3527607420.ch89Test -
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المؤلفون: Alexander Menck, Uwe Horn, Axel Zibold, Steffen Weissenberg, Robert Brunner, Gerd Buchda, Reinhard Steiner
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Diffraction, Microscope, Materials science, business.industry, Mask inspection, law.invention, Optics, Optical microscope, law, Solid immersion lens, Water immersion objective, business, Lithography, Immersion lithography
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::8f4786e112fadb32af620af82184115fTest
https://doi.org/10.1117/12.569019Test -
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المؤلفون: Axel Zibold, Thomas Scheruebl, Alexander Menck, Robert Brunner, J. Greif
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Engineering, business.industry, law.invention, Optics, law, Reticle, Process window, Stepper, Photolithography, Photomask, Beam homogenizer, business, Lithography, Aerial image
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::d3a2fc72093e99eee51253a594a64eefTest
https://doi.org/10.1117/12.568016Test -
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المؤلفون: Timo Moeller, Martin Ross-Messemer, Frank Stefan Hoeller, Alexander Menck, Manfred Weihnacht
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Diffraction, Wavelength, Optics, Materials science, business.industry, Optical engineering, Physics::Optics, Acoustic wave, Spatial frequency, business, Diffraction efficiency, Smart material, Diffraction grating
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::69bc29730193691d5fe0a848f068a7ebTest
https://doi.org/10.1117/12.388173Test