المؤلفون: Roswitha Altmann, S. Grasso, Maria Luisa Polignano, Andreas Nutsch, Jacopo Brivio, Davide Codegoni, G. Pavia

المصدر: ECS Transactions. 25:337-348

مصطلحات موضوعية: Materials science, Silicon, chemistry, Metallurgy, chemistry.chemical_element, Copper contamination

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::2614e42771a11e9ef2841af51b17878dTest
https://doi.org/10.1149/1.3204424Test

المؤلفون: G. Pavia, Giovanna Scarel, Luca Lamagna, Marco Fanciulli

المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 27:443-448

مصطلحات موضوعية: Materials science, Silicon, business.industry, Layer by layer, Analytical chemistry, chemistry.chemical_element, Germanium, Surfaces and Interfaces, Condensed Matter Physics, Surfaces, Coatings and Films, Atomic layer deposition, chemistry, Transmission electron microscopy, Atomic layer epitaxy, Optoelectronics, Microelectronics, business, Layer (electronics)

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::fa61806da813f2b657cc6fc53a5edc33Test
https://doi.org/10.1116/1.3097849Test

المؤلفون: F. Cazzaniga, G. Pavia, A. G. Mauri, F. Sammiceli, M. Mariani, M. L. Polignano, G. Spoldi, I. Mica, V. Bontempo

المصدر: Journal of Materials Science: Materials in Electronics. 19:182-188

مصطلحات موضوعية: Materials science, Silicon, business.industry, Annealing (metallurgy), chemistry.chemical_element, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Ion implantation, chemistry, Shallow trench isolation, Trench, Forensic engineering, Optoelectronics, Wafer, Electrical measurements, Kinetic Monte Carlo, Electrical and Electronic Engineering, business

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::86e8dd24ab0c78002f98f32abd0685cfTest
https://doi.org/10.1007/s10854-008-9630-4Test

المؤلفون: P. Besana, Enrico Varesi, G. Pavia, Yu. Yu. Lebedinskii, Alberto Modelli, Andrei Zenkevich, A. Giussani

المصدر: Journal of Physics and Chemistry of Solids. 68:1046-1051

مصطلحات موضوعية: Materials science, Silicon, Annealing (metallurgy), Oxide, chemistry.chemical_element, Mineralogy, General Chemistry, Condensed Matter Physics, X-ray reflectivity, chemistry.chemical_compound, chemistry, Chemical engineering, Plasma-enhanced chemical vapor deposition, General Materials Science, Grain boundary, Thin film, Tin

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::895619f7e403e837784a77c2f8cbf672Test
https://doi.org/10.1016/j.jpcs.2007.03.015Test

المؤلفون: S. Marangon, Marco Fanciulli, Claudia Wiemer, Emiliano Bonera, G. Tallarida, G. Mastracchio, E. Ricci, G. Pavia

المساهمون: Wiemer, C, Tallarida, G, Bonera, E, Ricci, E, Fanciulli, M, Mastracchio, G, Pavia, G, Marangon, S

المصدر: Microelectronic Engineering. 70:233-239

مصطلحات موضوعية: inorganic chemicals, Materials science, Silicon, Annealing (metallurgy), technology, industry, and agriculture, chemistry.chemical_element, Surface finish, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, X-ray reflectivity, chemistry.chemical_compound, Crystallography, CoSi2, ulsi, chemistry, Sputtering, Silicide, Surface roughness, Electrical and Electronic Engineering, Composite material, Cobalt

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ced8f276b878f1a85068fb26bd8bc992Test
https://doi.org/10.1016/s0167-9317Test(03)00429-5

المؤلفون: Gian Pietro Carnevale, F. Cazzaniga, I. Mica, G. Pavia, M. Martinelli, P Ghezzi, M. L. Polignano, Emiliano Bonera, M. Brambilla

المساهمون: Mica, I, Polignano, M, Carnevale, G, Ghezzi, P, Brambilla, M, Cazzaniga, F, Martinelli, M, Pavia, G, Bonera, E

المصدر: Journal of Physics: Condensed Matter. 14:13403-13410

مصطلحات موضوعية: Materials science, Fabrication, Silicon, business.industry, Transistor, Recrystallization (metallurgy), Mineralogy, chemistry.chemical_element, Condensed Matter Physics, Crystal defect, junction propertie, Crystallographic defect, ULSI, law.invention, Ion implantation, chemistry, Electron diffraction, law, Transmission electron microscopy, Optoelectronics, General Materials Science, business

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5ade8d85318b3428324db53c8d1d6540Test
https://doi.org/10.1088/0953-8984/14/48/395Test

المؤلفون: G. F. Mastracchio, Roberto Balboni, A. Benedetti, A. G. Cullis, Stefano Frabboni, Aldo Armigliato, G. Pavia

المصدر: Applied surface science 188 (2002): 214–218. doi:10.1016/S0169-4332(01)00750-4
info:cnr-pdr/source/autori:Benedetti A., Cullis A.G., Armigliato A., Balboni R., Frabboni S., Mastracchio G.F., Pavia G./titolo:Strain induced by Ti salicidation in sub-quarter-micron CMOS devices, as measured by TEM%2FCBED/doi:10.1016%2FS0169-4332(01)00750-4/rivista:Applied surface science/anno:2002/pagina_da:214/pagina_a:218/intervallo_pagine:214–218/volume:188

مصطلحات موضوعية: convergent beam electron diffraction, salicidation, Microscope, Materials science, Silicon, General Physics and Astronomy, Mineralogy, chemistry.chemical_element, shallow trenches, law.invention, strain, law, transmission electron microscopy, Ohmic contact, business.industry, Zone axis, Surfaces and Interfaces, General Chemistry, Condensed Matter Physics, Surfaces, Coatings and Films, CMOS, Electron diffraction, chemistry, Transmission electron microscopy, Optoelectronics, business, Tin

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::163548d4f88fae591371c1821da65f8aTest
https://doi.org/10.1016/s0169-4332Test(01)00750-4

المؤلفون: G. Pavia, F. Cazzaniga, Sabina Spiga, A. Sabbadini, G. Queirolo

المصدر: Microelectronic Engineering. 55:93-99

مصطلحات موضوعية: Materials science, Condensed matter physics, Silicon, Nucleation, chemistry.chemical_element, Substrate (electronics), Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Grain size, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry.chemical_compound, Crystallography, chemistry, Phase (matter), Silicide, Grain boundary, Crystallite, Electrical and Electronic Engineering

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::cf0621ccbb8b8b6f156f45366aeadf9eTest
https://doi.org/10.1016/s0167-9317Test(00)00433-0

المؤلفون: Maddalena Pedio, Marco Malvestuto, Stefano Nannarone, Federico Boscherini, Giovanna Scarel, Marco Fanciulli, G. Pavia

المساهمون: M. Malvestuto, M. Pedio S. Nannarone, G. Pavia, G. Scarel, M. Fanciulli, F. Boscherini

المصدر: Journal of applied physics 101 (2007).
info:cnr-pdr/source/autori:Malvestuto, M; Pedio, M; Nannarone, S; Pavia, G; Scarel, G; Fanciulli, M; Boscherini, F/titolo:A study of the growth of Lu2O3 on Si(001) by synchrotron radiation photoemission and transmission electron microscopy/doi:/rivista:Journal of applied physics/anno:2007/pagina_da:/pagina_a:/intervallo_pagine:/volume:101

مصطلحات موضوعية: Materials science, Silicon, business.industry, Band gap, CORE-LEVEL, Analytical chemistry, General Physics and Astronomy, Synchrotron radiation, chemistry.chemical_element, surface physics, Dielectric, Electronic structure, ATOMIC-LAYER DEPOSITION, Capacitance, chemistry, Transmission electron microscopy, EPITAXIAL-GROWTH, SYNCHROTRON RADIATION, Optoelectronics, MICROELECTRONICS, BAND OFFSETS, PRASEODYMIUM OXIDE, business, INTERFACES, Quantum tunnelling

وصف الملف: STAMPA

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8f7d2a675003cb2e9d0e60d6b42e22d3Test
https://hdl.handle.net/11380/743060Test

المؤلفون: Domenico Caputo, Maria Luisa Polignano, Federica Zanderigo, G. Pavia

المصدر: Solid State Phenomena. :413-420

مصطلحات موضوعية: Materials science, Silicon, chemistry, business.industry, Optoelectronics, chemistry.chemical_element, General Materials Science, Carrier lifetime, Contamination, Condensed Matter Physics, business, Atomic and Molecular Physics, and Optics

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::a81043ce85f621f0a1832fae7e1e8ba9Test
https://doi.org/10.4028/www.scientific.net/ssp.63-64.413Test