المؤلفون: P. Besana, Enrico Varesi, G. Pavia, Yu. Yu. Lebedinskii, Alberto Modelli, Andrei Zenkevich, A. Giussani

المصدر: Journal of Physics and Chemistry of Solids. 68:1046-1051

مصطلحات موضوعية: Materials science, Silicon, Annealing (metallurgy), Oxide, chemistry.chemical_element, Mineralogy, General Chemistry, Condensed Matter Physics, X-ray reflectivity, chemistry.chemical_compound, chemistry, Chemical engineering, Plasma-enhanced chemical vapor deposition, General Materials Science, Grain boundary, Thin film, Tin

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::895619f7e403e837784a77c2f8cbf672Test
https://doi.org/10.1016/j.jpcs.2007.03.015Test

المؤلفون: M. Alessandri, Sangam Banerjee, E. Bellandi, G. Pavia, S. Ferrari, S. Spadoni, C. Coccorese, Rossella Piagge, A. C. Elbaz

المصدر: Thin Solid Films. 450:120-123

مصطلحات موضوعية: Electron density, Metals and Alloys, Oxide, Analytical chemistry, Surfaces and Interfaces, Dielectric, Nitride, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Metrology, X-ray reflectivity, chemistry.chemical_compound, chemistry, Ellipsometry, Materials Chemistry, Thin film

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::adf89cd7b490c25e350f4d97bd41545dTest
https://doi.org/10.1016/j.tsf.2003.10.050Test

المؤلفون: Claudia Wiemer, Luca Lutterotti, Marco Fanciulli, G. Pavia, S. Ferrari

المصدر: Thin Solid Films. 450:134-137

مصطلحات موضوعية: Materials science, Rietveld refinement, Gate dielectric, Metals and Alloys, Analytical chemistry, Surfaces and Interfaces, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Amorphous solid, X-ray reflectivity, Crystallography, Atomic layer deposition, Materials Chemistry, Surface roughness, Thin film, High-κ dielectric

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::d4f9bf34be536ce73ad8f04c3af73692Test
https://doi.org/10.1016/j.tsf.2003.10.057Test

المؤلفون: S. Marangon, Marco Fanciulli, Claudia Wiemer, Emiliano Bonera, G. Tallarida, G. Mastracchio, E. Ricci, G. Pavia

المساهمون: Wiemer, C, Tallarida, G, Bonera, E, Ricci, E, Fanciulli, M, Mastracchio, G, Pavia, G, Marangon, S

المصدر: Microelectronic Engineering. 70:233-239

مصطلحات موضوعية: inorganic chemicals, Materials science, Silicon, Annealing (metallurgy), technology, industry, and agriculture, chemistry.chemical_element, Surface finish, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, X-ray reflectivity, chemistry.chemical_compound, Crystallography, CoSi2, ulsi, chemistry, Sputtering, Silicide, Surface roughness, Electrical and Electronic Engineering, Composite material, Cobalt

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ced8f276b878f1a85068fb26bd8bc992Test
https://doi.org/10.1016/s0167-9317Test(03)00429-5

المؤلفون: G. Queirolo, G Pavia, Federico Corni, Rita Tonini, A Pontiroli, R. Zonca

المصدر: Materials Science and Engineering: B. :96-99

مصطلحات موضوعية: Materials science, business.industry, Mechanical Engineering, Condensed Matter Physics, Laser, law.invention, Photodiode, X-ray reflectivity, Wavelength, Optics, Mechanics of Materials, law, Time-Resolved Reflectivity, solid-state transformations, techniques, Microelectronics, General Materials Science, Thin film, business, Refractive index, Intensity (heat transfer)

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::82dccfe8847a7738d5c7055e2dd26b87Test
https://doi.org/10.1016/s0921-5107Test(01)00981-3

المؤلفون: G. F. Mastracchio, Roberto Balboni, A. Benedetti, A. G. Cullis, Stefano Frabboni, Aldo Armigliato, G. Pavia

المصدر: Applied surface science 188 (2002): 214–218. doi:10.1016/S0169-4332(01)00750-4
info:cnr-pdr/source/autori:Benedetti A., Cullis A.G., Armigliato A., Balboni R., Frabboni S., Mastracchio G.F., Pavia G./titolo:Strain induced by Ti salicidation in sub-quarter-micron CMOS devices, as measured by TEM%2FCBED/doi:10.1016%2FS0169-4332(01)00750-4/rivista:Applied surface science/anno:2002/pagina_da:214/pagina_a:218/intervallo_pagine:214–218/volume:188

مصطلحات موضوعية: convergent beam electron diffraction, salicidation, Microscope, Materials science, Silicon, General Physics and Astronomy, Mineralogy, chemistry.chemical_element, shallow trenches, law.invention, strain, law, transmission electron microscopy, Ohmic contact, business.industry, Zone axis, Surfaces and Interfaces, General Chemistry, Condensed Matter Physics, Surfaces, Coatings and Films, CMOS, Electron diffraction, chemistry, Transmission electron microscopy, Optoelectronics, business, Tin

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::163548d4f88fae591371c1821da65f8aTest
https://doi.org/10.1016/s0169-4332Test(01)00750-4

المؤلفون: G. Pavia, F. Cazzaniga, Sabina Spiga, A. Sabbadini, G. Queirolo

المصدر: Microelectronic Engineering. 55:93-99

مصطلحات موضوعية: Materials science, Condensed matter physics, Silicon, Nucleation, chemistry.chemical_element, Substrate (electronics), Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Grain size, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry.chemical_compound, Crystallography, chemistry, Phase (matter), Silicide, Grain boundary, Crystallite, Electrical and Electronic Engineering

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::cf0621ccbb8b8b6f156f45366aeadf9eTest
https://doi.org/10.1016/s0167-9317Test(00)00433-0

المؤلفون: G. Casati, G. Queirolo, F. Cazzaniga, G. Pavia, S. Alberici, A. Sabbadini, V. Cusi, C. Bresolin

المصدر: Microelectronic Engineering. 55:205-211

مصطلحات موضوعية: business.industry, Contact resistance, Nucleation, chemistry.chemical_element, Plasma, equipment and supplies, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Barrier layer, Optics, chemistry, Metallizing, Electrical and Electronic Engineering, Thin film, Composite material, business, Tin, Layer (electronics)

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::e5f2464f0292e9c95914e8bbc03bec9aTest
https://doi.org/10.1016/s0167-9317Test(00)00449-4

المؤلفون: F. Pellizzer, G. Pavia

المصدر: Journal of Non-Crystalline Solids. 280:235-240

مصطلحات موضوعية: Materials science, business.industry, Extraction (chemistry), Electrical Evaluation, Oxide, Nanotechnology, Quantum Hall effect, Condensed Matter Physics, Capacitance, Electronic, Optical and Magnetic Materials, chemistry.chemical_compound, chemistry, Transmission electron microscopy, Materials Chemistry, Ceramics and Composites, Optoelectronics, business, Voltage

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::6b4029f65c40893e2ddd3f38449fdf14Test
https://doi.org/10.1016/s0022-3093Test(00)00391-4

المؤلفون: S. Cresta, G. Pavia, John H. Callomon

المصدر: Geobios. 27:103-110

مصطلحات موضوعية: Ammonite, Taphonomy, biology, Outcrop, Lithology, Lithostratigraphy, Paleontology, Biostratigraphy, biology.organism_classification, language.human_language, Ancolioceras, Space and Planetary Science, language, Type locality, Geology

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::9a0fbc7d74e8212fc628b8c46963a632Test
https://doi.org/10.1016/s0016-6995Test(94)80129-0