المؤلفون: Lungwitz, F., Schumann, E., Wenisch, R., Neubert, M., Guillen, E., Escobar, R., Krause, M., Gemming, S.

المصدر: Frühjahrstagung der DPG, 19.03.2015, Berlin, Deutschland

مصطلحات موضوعية: high temperature, energy materials, TCO, transparent conductive oxide, magnetron sputtering, thin film, solar-thermal, Cluster Tool

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=od______4577::5037ae1f05cf7332aeb35be0530137d7Test
https://www.hzdr.de/publications/Publ-22202-1Test

المؤلفون: Lungwitz, F., Schumann, E., Guillen, E., Escobar, R., Krause, M., Gemming, S.

المصدر: ICMAT 2015 & IUMRS-ICA 2015, 28.06.-03.07.2015, Singapore, Singapore

مصطلحات موضوعية: solar thermal, high temperature, TCO, transparent conductive oxide, magnetron sputtering, solar selectivity, TiO2, Cluster Tool

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=od______4577::64b131119b50c1f2efd72581f0b530d8Test
https://www.hzdr.de/publications/Publ-22203-1Test

المؤلفون: Ramón Escobar-Galindo, Matthias Krause, I. Heras, Jose L. Endrino, Robert Wenisch, E. Guillén

المساهمون: Universidad de Sevilla. Departamento de Física Aplicada I

المصدر: 3rd International Conference on Through-life Engineering Services, 04.11.2014, Cranfield, United Kingdom
3rd International Conference on Through-life Engineering Services, 04.-05.11.2014, Cranfield, United KingdomProcedia CIRP 22 ( 2014 ), 271-276

مصطلحات موضوعية: Materials science, Thin films, Analytical chemistry, Failure mechanism, real time spectroscopic ellipsometry, symbols.namesake, Cluster (physics), high temperature applications, thermal degradation, Thin film, General Environmental Science, Ion beam analysis, business.industry, Environmental chamber, cluster tool, ion beam analysis, Characterization (materials science), Raman spectroscopy, symbols, General Earth and Planetary Sciences, Optoelectronics, sense organs, optical constants, business, Material properties

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9b562853105b8971e3ced0e800ff9ad7Test

المؤلفون: MengChu Zhou, Naiqi Wu, Chengbin Chu, Feng Chu

المساهمون: Department of Industrial Engineering, School of Electromechanical Engineering [Guangzhou], Guangdong University of Science and Technology (GUST)-Guangdong University of Science and Technology (GUST), Informatique, Biologie Intégrative et Systèmes Complexes (IBISC), Université d'Évry-Val-d'Essonne (UEVE), Laboratoire Génie Industriel (LGI), CentraleSupélec-Université Paris-Saclay

المصدر: IEEE transactions on systems, man, and cybernetics
IEEE transactions on systems, man, and cybernetics, Institute of Electrical and Electronics Engineers (IEEE), 2013, 43 (5), pp.1182-1194. ⟨10.1109/TSMCA.2012.2230440⟩
IEEE transactions on systems, man, and cybernetics, 2013, 43 (5), pp.1182-1194. ⟨10.1109/TSMCA.2012.2230440⟩

مصطلحات موضوعية: 0209 industrial biotechnology, Schedule, Mathematical optimization, Semiconductor manufacturing, Computer science, Semiconductor device fabrication, Real-time computing, Scheduling (production processes), ComputerApplications_COMPUTERSINOTHERSYSTEMS, Petri nets, 02 engineering and technology, Scheduling (computing), Wafer fabrication, 020901 industrial engineering & automation, Hardware_INTEGRATEDCIRCUITS, 0202 electrical engineering, electronic engineering, information engineering, Electrical and Electronic Engineering, Cluster tool, Wafer-scale integration, Scheduling, 020208 electrical & electronic engineering, Flow shop scheduling, [INFO.INFO-RO]Computer Science [cs]/Operations Research [cs.RO], Petri net, Computer Science Applications, Human-Computer Interaction, Control and Systems Engineering, Two-level scheduling, Software

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::848a74b2342abb787a9cda9a85b1a349Test
https://hal.archives-ouvertes.fr/hal-00867371/documentTest

المؤلفون: Wu, Naiqi, Chu, Feng, Chu, Chengbin, Zhou, Mengchu

المساهمون: Department of Industrial Engineering, School of Electromechanical Engineering Guangzhou, Guangdong University of Science and Technology (GUST)-Guangdong University of Science and Technology (GUST), Informatique, Biologie Intégrative et Systèmes Complexes (IBISC), Université d'Évry-Val-d'Essonne (UEVE), Laboratoire Génie Industriel - EA 2606 (LGI), CentraleSupélec, Key Laboratory of Embedded System and Service Computing, Tongji University, Department of Electrical and Computer Engineering, New Jersey Institute of Technology Newark (NJIT)

المصدر: ISSN: 1083-4427.

مصطلحات موضوعية: Cluster tool, Petri nets (PNs), discrete event system, scheduling, semiconductor manufacturing, [SPI.AUTO]Engineering Sciences [physics]/Automatic, [INFO.INFO-RO]Computer Science [cs]/Operations Research [math.OC]

العلاقة: hal-00735482; https://hal.science/hal-00735482Test

الإتاحة: https://doi.org/10.1109/TSMCA.2012.2187890Test
https://hal.science/hal-00735482Test

المؤلفون: Schneider, C., Pfitzner, L., Ryssel, H.

مصطلحات موضوعية: Mikroelektronik, Fertigung, integrierte Meßtechnik, in situ-Meßtechnik, Prozeßkontrolle, Fehlererkennung, Lithographie, Partikelmessung, cluster tool, sensor, Plasmadiagnose

الوقت: 670, 620, 530

العلاقة: Conference on In-Line Characterization, Yield, Reliability, and Failure Analysis in Microelectronic Manufacturing 2001; In-line characterization, yield, reliability, and failure analysis in microelectronic manufacturing; https://publica.fraunhofer.de/handle/publica/338028Test

الإتاحة: https://doi.org/10.1117/12.425280Test
https://publica.fraunhofer.de/handle/publica/338028Test

المؤلفون: Lee, Seungchul, Ni, Jun

مصطلحات موضوعية: Chamber condition, Cluster tool, Decision making process, Degradation condition, Job scheduling, Maintenance activity, Optimization method, Scheduling problem, Semiconductor manufacturing process, Semiconductor manufacturing systems, Sequencing problems, Simulation-based optimizations, Wafer yields

العلاقة: MATHEMATICAL PROBLEMS IN ENGINEERING, v.2012, no., pp.875641 -; http://scholarworks.unist.ac.kr/handle/201301/8372Test; http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=84870183956Test; 1288; 18172; 2-s2.0-84870183956; 000310635100001; http://dx.doi.org/10.1155/2012/875641Test

الإتاحة: https://doi.org/10.1155/2012/875641Test
http://scholarworks.unist.ac.kr/handle/201301/8372Test
http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=84870183956Test

المؤلفون: MengChu Zhou, Chengbin Chu, Feng Chu, Naiqi Wu

المساهمون: Department of Industrial Engineering, School of Electromechanical Engineering [Guangzhou], Guangdong University of Science and Technology (GUST)-Guangdong University of Science and Technology (GUST), Informatique, Biologie Intégrative et Systèmes Complexes (IBISC), Université d'Évry-Val-d'Essonne (UEVE), Laboratoire Génie Industriel - EA 2606 (LGI), CentraleSupélec, Key Laboratory of Embedded System and Service Computing, Tongji University, Department of Electrical and Computer Engineering, New Jersey Institute of Technology [Newark] (NJIT)

المصدر: IEEE Transactions on Systems, Man and Cybernetics, Part A: Systems and Humans
IEEE Transactions on Systems, Man and Cybernetics, Part A: Systems and Humans, Institute of Electrical and Electronics Engineers, 2013, 43 (1), pp.196--207. ⟨10.1109/TSMCA.2012.2187890⟩
IEEE Transactions on Systems, Man and Cybernetics, Part A: Systems and Humans, 2013, 43 (1), pp.196--207. ⟨10.1109/TSMCA.2012.2187890⟩

مصطلحات موضوعية: semiconductor manufacturing, 0209 industrial biotechnology, Semiconductor device fabrication, Computer science, Distributed computing, Real-time computing, 02 engineering and technology, Scheduling (computing), [SPI.AUTO]Engineering Sciences [physics]/Automatic, Wafer fabrication, Cycle time, 020901 industrial engineering & automation, 0202 electrical engineering, electronic engineering, information engineering, Hardware_INTEGRATEDCIRCUITS, Wafer, scheduling, Electrical and Electronic Engineering, discrete event system, Cluster tool, [INFO.INFO-RO]Computer Science [cs]/Operations Research [cs.RO], Petri net, Computer Science Applications, Human-Computer Interaction, Control and Systems Engineering, 020201 artificial intelligence & image processing, Petri nets (PNs), Swap (computer programming), Software

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::00420c6717fd897a2252cac721908e92Test
https://hal.archives-ouvertes.fr/hal-00735482Test

المؤلفون: Walk, H., Bader, U.

مصطلحات موضوعية: cluster tool, Modularität, modularity, Standardisierung, standardization, open software concept, interface, Mikrotechnik, Fertigungssystem, simulation, Schnittstelle

الوقت: 670

العلاقة: International Symposium on Microsystems 2000; European Semiconductor Manufacturing Conference (SEMICON Europa) 2000; MST/MEMS/Micro-Machining Technology: Infrastructure and Commercialization Conference; https://publica.fraunhofer.de/handle/publica/335628Test

الإتاحة: https://publica.fraunhofer.de/handle/publica/335628Test

المؤلفون: Kasko, I., Oechsner, R., Froeschle, B., Schneider, C., Pfitzner, L., Ryssel, H.

مصطلحات موضوعية: analytical module, cluster tool, process control, vapor phase cleaning, XPS

الوقت: 670, 620, 530

العلاقة: International Symposium on Semiconductor Manufacturing (ISSM) 1997; 6th International Symposium on Semiconductor Manufacturing 1997. Proceedings; https://publica.fraunhofer.de/handle/publica/328456Test

الإتاحة: https://doi.org/10.1109/ISSM.1997.664618Test
https://publica.fraunhofer.de/handle/publica/328456Test