مؤتمر
Influence of dcMS and HPPMS in a dcMS/HPPMS Hybrid Process on Plasma and Coating Properties
| العنوان: | Influence of dcMS and HPPMS in a dcMS/HPPMS Hybrid Process on Plasma and Coating Properties |
|---|---|
| المؤلفون: | Bobzin, Kirsten, Brögelmann, Tobias, Kruppe, Nathan Christopher, Engels, Martin Gottfried |
| المصدر: | 43. International Conference on Metallurgical Coatings and Thin Films, ICMCTF 2016, San Diego, CA, USA, 2016-04-25 - 2016-04-29 |
| سنة النشر: | 2016 |
| المجموعة: | RWTH Aachen University: RWTH Publications |
| مصطلحات موضوعية: | dsMS/HPPMS Hybrid |
| جغرافية الموضوع: | DE |
| نوع الوثيقة: | conference object |
| اللغة: | English |
| العلاقة: | https://publications.rwth-aachen.de/record/669096Test; https://publications.rwth-aachen.de/search?p=id:%22RWTH-2016-07234%22Test |
| الإتاحة: | https://publications.rwth-aachen.de/record/669096Test https://publications.rwth-aachen.de/search?p=id:%22RWTH-2016-07234%22Test |
| حقوق: | info:eu-repo/semantics/closedAccess |
| رقم الانضمام: | edsbas.A6ECE788 |
| قاعدة البيانات: | BASE |
| الوصف غير متاح. |