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1دورية أكاديمية
المؤلفون: Patil, Sumit R., Barhate, Viral N., Patil, Vilas S., Agrawal, Khushabu S., Mahajan, Ashok M.
المصدر: Journal of Materials Science: Materials in Electronics; May2022, Vol. 33 Issue 14, p11227-11235, 9p
مصطلحات موضوعية: METAL oxide semiconductor capacitors, X-ray photoelectron spectroscopy, ATOMIC layer deposition, CAPACITORS, ATOMIC force microscopy, X-ray diffraction measurement, STRAY currents
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2دورية أكاديميةPlasma-enhanced atomic layer-deposited La
2 O3 ultra-thin films on Si and 6H–SiC: a comparative study.المؤلفون: Agrawal, Khushabu S.1,2 (AUTHOR), Barhate, Viral N.1 (AUTHOR), Patil, Vilas S.1,2 (AUTHOR), Patil, Lalit S.3 (AUTHOR), Mahajan, A. M.1 (AUTHOR) ammahajan@nmu.ac.in
المصدر: Applied Physics A: Materials Science & Processing. Aug2020, Vol. 126 Issue 8, pN.PAG-N.PAG. 1p. 1 Diagram, 2 Charts, 9 Graphs.
مصطلحات موضوعية: *METAL oxide semiconductors, *ATOMIC layer deposition, *X-ray photoelectron spectroscopy, *ATOMIC force microscopy, *TRANSMISSION electron microscopy, *GOLD