المؤلفون: Ma, Liangbo, Wang, Jiawei, Wang, Zheng, Wang, Kunfeng, Zhai, Zhaoyang, Cai, Pengcheng, Xiong, Xingyin, Zou, Xudong

المصدر: Journal of Microelectromechanical Systems; Dec2022, Vol. 31 Issue 6, p901-911, 11p

مصطلحات موضوعية: PHASE-locked loops, VOLTAGE-controlled oscillators, ACCELEROMETERS, ELECTROMAGNETIC interference, MICROELECTROMECHANICAL systems

المؤلفون: Pandit, Milind, Mustafazade, Arif, Sobreviela, Guillermo, Zhao, Chun, Zou, Xudong, Seshia A, Ashwin

المساهمون: Mustafazade, Arif

مصطلحات موضوعية: Frequency measurement, Noise processes, Pressure dependence, Resonant frequency, Resonators, Semiconductor device measurement, Silicon, Silicon MEMS, Temperature dependence, Temperature measurement, Temperature sensors

وصف الملف: application/pdf

العلاقة: Journal of Microelectromechanical Systems; Makale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı; Pandit, M., Mustafazade, A., Sobreviela, G., Zhao, C., Zou, X., & Seshia, A. A. (21 May 2021). Experimental Observation of Temperature and Pressure Induced Frequency Fluctuations in Silicon MEMS Resonators. Journal of Microelectromechanical Systems. p. 1-6.; https://doi.org/10.1109/JMEMS.2021.3077633Test; https://hdl.handle.net/20.500.11779/1494Test; 1-6; Q2; Q1

الإتاحة: https://doi.org/20.500.11779/1494Test
https://doi.org/10.1109/JMEMS.2021.3077633Test
https://hdl.handle.net/20.500.11779/1494Test

المؤلفون: Cai, Pengcheng, Xiong, Xingyin, Wang, Kunfeng, Wang, Jiawei, Zou, Xudong

المصدر: Micromachines; Sep2021, Vol. 12 Issue 9, p1022, 1p

مصطلحات موضوعية: TEMPERATURE sensors, ACCELEROMETERS, TEMPERATURE