دورية أكاديمية
Experimental observation of temperature and pressure induced frequency fluctuations in silicon MEMS resonators
| العنوان: | Experimental observation of temperature and pressure induced frequency fluctuations in silicon MEMS resonators |
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| المؤلفون: | Pandit, Milind, Mustafazade, Arif, Sobreviela, Guillermo, Zhao, Chun, Zou, Xudong, Seshia A, Ashwin |
| المساهمون: | Mustafazade, Arif |
| بيانات النشر: | IEEE |
| سنة النشر: | 2021 |
| المجموعة: | MEF University Institutional Repository (DSpace@MEF) |
| مصطلحات موضوعية: | Frequency measurement, Noise processes, Pressure dependence, Resonant frequency, Resonators, Semiconductor device measurement, Silicon, Silicon MEMS, Temperature dependence, Temperature measurement, Temperature sensors |
| الوصف: | Silicon MEMS resonators are increasingly being adopted for applications in timing and frequency control, as well as precision sensing. It is well established that a key limitation to performance is associated with sensitivity to environmental variables such as temperature and pressure. As a result, technical approaches to address these factors such as vacuum sealing and ovenization of the resonators in a temperature controlled system have been introduced. However, residual sensitivity to such effects can still serve as a significant source of frequency fluctuations and drift in precision devices. This is experimentally demonstrated in this paper for a precision oven-controlled and vacuum-sealed silicon resonators. The frequency fluctuations of oscillators constructed using two separate nearly-identical co-located resonators on the same chip are analysed and differential frequency fluctuations are examined as a means of reducing the impact of common-mode effects such as temperature and pressure. For this configuration, our results show that the mismatch of temperature and pressure coefficients between the resonators ultimately limits the frequency stability. ; Natural Environment Research Council; Innovate U.K. ; WOS:000673501700002 ; 2-s2.0-85107193670 ; Science Citation Index Expanded ; Article ; Uluslararası işbirliği ile yapılan - EVET ; Uluslararası işbirliği ile yapılan - EVET ; Ağustos ; 2021 ; YÖK - 2020-21 |
| نوع الوثيقة: | article in journal/newspaper |
| وصف الملف: | application/pdf |
| اللغة: | English |
| تدمد: | 1057-7157 1941-0158 |
| العلاقة: | Journal of Microelectromechanical Systems; Makale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı; Pandit, M., Mustafazade, A., Sobreviela, G., Zhao, C., Zou, X., & Seshia, A. A. (21 May 2021). Experimental Observation of Temperature and Pressure Induced Frequency Fluctuations in Silicon MEMS Resonators. Journal of Microelectromechanical Systems. p. 1-6.; https://doi.org/10.1109/JMEMS.2021.3077633Test; https://hdl.handle.net/20.500.11779/1494Test; 1-6; Q2; Q1 |
| DOI: | 10.1109/JMEMS.2021.3077633 |
| الإتاحة: | https://doi.org/20.500.11779/1494Test https://doi.org/10.1109/JMEMS.2021.3077633Test https://hdl.handle.net/20.500.11779/1494Test |
| حقوق: | info:eu-repo/semantics/closedAccess |
| رقم الانضمام: | edsbas.845DC6F0 |
| قاعدة البيانات: | BASE |
| تدمد: | 10577157 19410158 |
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| DOI: | 10.1109/JMEMS.2021.3077633 |