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1
المؤلفون: Ronald P. Millman, David J. Elliott, Eugene O. Degenkolb, Kenneth J. Harte, Victoria M. Chaplick
المصدر: Solid State Phenomena. 187:117-120
مصطلحات موضوعية: Materials science, business.industry, Process (computing), Photoresist, Edge (geometry), Radiation, Condensed Matter Physics, Laser, Atomic and Molecular Physics, and Optics, Die (integrated circuit), law.invention, Bead (woodworking), law, Optoelectronics, General Materials Science, Wafer, Composite material, business
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::fdb9177edfae887d380ae0f47abc8a1dTest
https://doi.org/10.4028/www.scientific.net/ssp.187.117Test -
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المؤلفون: David J. Elliott
مصطلحات موضوعية: Materials science, business.industry, Optical engineering, Physics::Optics, Polarizer, Laser, medicine.disease_cause, law.invention, Wavelength, Optics, Interference (communication), law, medicine, Optoelectronics, Reflection (computer graphics), business, Beam splitter, Ultraviolet
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::05a9d1bd94e77df155cc6a2d2f6e63d9Test
https://doi.org/10.1016/b978-0-12-237070-0.50009-1Test -
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المؤلفون: David J. Elliott
مصطلحات موضوعية: Materials science, Silicon, Dopant, business.industry, Doping, chemistry.chemical_element, Ion, Monocrystalline silicon, Crystallography, Ion implantation, chemistry, Impurity, Optoelectronics, Wafer, business
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::217591dfe6c5eef15fa53bd92dff3208Test
https://doi.org/10.1016/b978-0-12-237070-0.50011-xTest -
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المؤلفون: David J. Elliott
مصطلحات موضوعية: Materials science, Excimer laser, business.industry, medicine.medical_treatment, Physics::Optics, Photoablation, Radiation, Excimer, Laser, medicine.disease_cause, law.invention, Wavelength, Optics, law, Physics::Atomic and Molecular Clusters, medicine, Optoelectronics, Physics::Atomic Physics, business, Tunable laser, Ultraviolet
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::7c9620cbd1c85db54e22077ab9bcdc1eTest
https://doi.org/10.1016/b978-0-12-237070-0.50007-8Test -
5
المؤلفون: David J. Elliott
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Materials science, business.industry, Optical engineering, Integrated circuit, law.invention, Numerical aperture, Lens (optics), Catadioptric system, Optics, Resist, law, Optoelectronics, Photolithography, business, Lithography
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::2a5887f2878f4f650317dfb1c68ca6f3Test
https://doi.org/10.1117/12.143051Test -
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المؤلفون: David J. Elliott, Uday K. Sengupta
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Materials science, Excimer laser, business.industry, medicine.medical_treatment, Optical engineering, ComputerApplications_COMPUTERSINOTHERSYSTEMS, Laser, law.invention, Optics, law, medicine, Optoelectronics, Wafer, Stepper, Photolithography, business, Lithography, Tunable laser
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::578090c13db2f366488f125758edd7a7Test
https://doi.org/10.1117/12.25017Test -
7
المؤلفون: David J. Elliott, David C. Ferranti
المصدر: Microelectronic Engineering. 9:59-63
مصطلحات موضوعية: Latent image, Materials science, Excimer laser, business.industry, medicine.medical_treatment, Condensed Matter Physics, Excimer, Laser, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, Optics, Resist, law, Reticle, medicine, Optoelectronics, Electrical and Electronic Engineering, Photolithography, business, Lithography
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::6674821775179ca75b4f41c4cd4cd32eTest
https://doi.org/10.1016/0167-9317Test(89)90013-0 -
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المؤلفون: David J. Elliott, Mary Ann Hockey
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Fabrication, Materials science, business.industry, Semiconductor technology, Optical engineering, Nanotechnology, Photoresist, law.invention, Semiconductor, law, Imaging technology, Optoelectronics, X-ray lithography, Photolithography, business
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::339d4281cc6e400aa9b1c4e6d8078a2bTest
https://doi.org/10.1117/12.956123Test -
9
المؤلفون: David J. Elliott, David C. Ferranti, Burn J. Lin
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Laser ablation, Materials science, Excimer laser, business.industry, Extreme ultraviolet lithography, medicine.medical_treatment, Laser, law.invention, Optics, Resist, law, medicine, Optoelectronics, X-ray lithography, Photolithography, business, Lithography
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::957f76a0beebd78632b8c6314baa00f8Test
https://doi.org/10.1117/12.968449Test -
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المؤلفون: David J. Elliott, Bernhard P. Piwczyk
المصدر: MRS Proceedings. 76
مصطلحات موضوعية: Very-large-scale integration, Laser ablation, Fabrication, Materials science, Excimer laser, business.industry, Semiconductor device fabrication, medicine.medical_treatment, Hardware_PERFORMANCEANDRELIABILITY, Photoresist, Laser, law.invention, Etching (microfabrication), law, Hardware_INTEGRATEDCIRCUITS, medicine, Optoelectronics, Wafer, Integrated circuit packaging, Electronics, business
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b92bc5cffde288b5c8c624bbe21c2411Test
https://doi.org/10.1557/proc-76-295Test