دورية أكاديمية
Characterisation of ultra-shallow disorder profiles and dielectric functions in ion implanted Si
| العنوان: | Characterisation of ultra-shallow disorder profiles and dielectric functions in ion implanted Si |
|---|---|
| المؤلفون: | Mohacsi, I., Petrik, P., Fried, M., Lohner, T., van den Berg, J.A., Reading, M.A., Giubertoni, D., Barozzi, M., Parisini, A. |
| المساهمون: | Hungarian Research Fund, European Commission Research Infrastructure Action, Hungarian NKTH ICMET07 project |
| المصدر: | Thin Solid Films ; volume 519, issue 9, page 2847-2851 ; ISSN 0040-6090 |
| بيانات النشر: | Elsevier BV |
| سنة النشر: | 2011 |
| المجموعة: | ScienceDirect (Elsevier - Open Access Articles via Crossref) |
| مصطلحات موضوعية: | Materials Chemistry, Metals and Alloys, Surfaces, Coatings and Films, Surfaces and Interfaces, Electronic, Optical and Magnetic Materials |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | English |
| DOI: | 10.1016/j.tsf.2010.12.076 |
| الإتاحة: | https://doi.org/10.1016/j.tsf.2010.12.076Test https://api.elsevier.com/content/article/PII:S0040609010017062?httpAccept=text/xmlTest https://api.elsevier.com/content/article/PII:S0040609010017062?httpAccept=text/plainTest |
| حقوق: | https://www.elsevier.com/tdm/userlicense/1.0Test/ |
| رقم الانضمام: | edsbas.8318CAD7 |
| قاعدة البيانات: | BASE |
| DOI: | 10.1016/j.tsf.2010.12.076 |
|---|