المؤلفون: Lee, Jin-Ku, Ju, Min-Ae, Oh, Jae-Geun, Hwang, Sun-Hwan, Jeon, Seung-Joon, Ku, Ja-Chun, Park, Sungki, Lee, Kyung-Won, Kim, Steve, Ra, Geum-Joo, Reece, Ron, Rubin, Leonard M., Krull, W. A., Cho, H. T.

المصدر: AIP Conference Proceedings; 11/3/2008, Vol. 1066 Issue 1, p395-398, 4p, 5 Black and White Photographs, 1 Diagram, 6 Graphs

مصطلحات موضوعية: ION implantation, CRYSTALLIZATION, ANNEALING of crystals, ULTRAVIOLET radiation, SILICON, ION bombardment, METAL oxide semiconductor field-effect transistors

المؤلفون: Lee, Joonho, Choi, Jaewoong, An, Jungsoo, Ryu, Seonho, Lee, Kyung Won, Kim, Jonghoon, Ra, Geum Joo, Kim, Steve, Cho, H. T.

المصدر: AIP Conference Proceedings; 11/3/2008, Vol. 1066 Issue 1, p438-441, 4p, 12 Graphs

مصطلحات موضوعية: ION implantation, SEMICONDUCTOR doping, DYNAMIC random access memory, ION bombardment, MANUFACTURING processes

المؤلفون: Kyung Won Lee, Jin Ku Lee, Jae Geun Oh, Tae Hoon Huh, Min Ae Ju, Seung Joon Jeon, Ja Chun Ku, Sung Ki Park, Kim, Steve, Dae Ho Yoon, Geum Joo Ra, Harris, Mark A., Reece, Ronald N.

المصدر: AIP Conference Proceedings; 11/3/2008, Vol. 1066 Issue 1, p505-508, 4p, 8 Black and White Photographs, 2 Diagrams, 2 Charts, 4 Graphs

مصطلحات موضوعية: ION implantation, DYNAMIC random access memory, ION bombardment, BORON, TRANSMISSION electron microscopy

المؤلفون: Hwang, Sun-Hwan, Kim, D. S., Joo, Y. H., Oh, J. G., Lee, J. K., Jung, T. W., Cho, H. J., Sohn, Y. S., Sheen, D. S., Pyi, S. H., Kim, Steve, Huh, T. H., Krull, W. A., Cho, H. T.

المصدر: AIP Conference Proceedings; 2006, Vol. 866 Issue 1, p163-166, 4p, 2 Diagrams, 7 Graphs

مصطلحات موضوعية: ION implantation, CAPACITORS, FOCUSED ion beams, BORON, SECONDARY ion mass spectrometry, SILICON, HYDROGEN content of metals, THERMAL desorption