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المؤلفون: Kentaro Kawai, Miho Morita, Yasunori Nakamukai, Mizuho Morita, Cassia Tiemi Azevedo, Junichi Uchikoshi, Kenta Arima, Yuki Miyata
المصدر: Microelectronic Engineering. 180:93-95
مصطلحات موضوعية: Materials science, Silicon, Silicon on insulator, chemistry.chemical_element, 02 engineering and technology, Thermal treatment, 01 natural sciences, law.invention, Optics, law, Etching (microfabrication), 0103 physical sciences, Electrical and Electronic Engineering, 010302 applied physics, Thermal oxidation, business.industry, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Exfoliation joint, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Projector, chemistry, Optoelectronics, 0210 nano-technology, business, Layer (electronics)
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::eb587372fadb4eb9f99e48b7bddd7b50Test
https://doi.org/10.1016/j.mee.2017.06.008Test -
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المؤلفون: Mizuho Morita, Kenta Arima, Yasuhisa Sano, Kazuto Yamauchi, Takeshi Okamoto, Atsushi Mura, Tatsuya Kawase, Kentaro Kawai, Yusuke Saito
المصدر: ChemElectroChem. 2:1656-1659
مصطلحات موضوعية: Imagination, Chemical substance, Materials science, media_common.quotation_subject, Nanotechnology, Isotropic etching, Catalysis, law.invention, Metal, Magazine, Chemical engineering, law, Etching (microfabrication), visual_art, Electrochemistry, visual_art.visual_art_medium, Science, technology and society, media_common
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::19bda73877031343a4de4b8c8139d1f8Test
https://doi.org/10.1002/celc.201500245Test -
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المؤلفون: Mizuho Morita, Kenta Arima, Kentaro Kawai, Naoki Saito, Akito Imafuku, Yasuhisa Sano, Daichi Mori
المصدر: ECS Transactions. 64:23-28
مصطلحات موضوعية: Thermal oxidation, X-ray photoelectron spectroscopy, Chemistry, Etching (microfabrication), Homogeneous, Graphene, law, Analytical chemistry, chemistry.chemical_element, Plasma, Layer (electronics), Carbon, law.invention
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::fa35dfbbbb48e9d3fee9420e5b788b38Test
https://doi.org/10.1149/06417.0023ecstTest -
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المؤلفون: Toshinori Hirano, Junichi Uchikoshi, Masaki Otani, Kentaro Tsukamoto, Kenji Adachi, Kenta Arima, Kentaro Kawai, Takabumi Nagai, Mizuho Morita
المصدر: ECS Transactions. 50:109-114
مصطلحات موضوعية: Surface (mathematics), Materials science, business.industry, fungi, technology, industry, and agriculture, Optical property, Oxide, macromolecular substances, law.invention, chemistry.chemical_compound, Optics, chemistry, Resist, law, Etching (microfabrication), Optoelectronics, Wafer, Photolithography, business, Pyramid (geometry)
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8c5169029148141834bb04f7fc30a01cTest
https://doi.org/10.1149/05051.0109ecstTest -
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المؤلفون: Kenji Adachi, Toshinori Hirano, Yutaka Ie, Junichi Uchikoshi, Kenta Arima, Masaki Otani, Kentaro Tsukamoto, Kentaro Kawai, Mizuho Morita, Takabumi Nagai
المصدر: Current Applied Physics. 12:S29-S32
مصطلحات موضوعية: Materials science, Dopant, Silicon, Band gap, fungi, technology, industry, and agriculture, General Physics and Astronomy, chemistry.chemical_element, macromolecular substances, Photochemistry, Light intensity, chemistry, Etching (microfabrication), Excited state, General Materials Science, Dry etching, Reactive-ion etching
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::1caf40efb97d0fb585e6205f02a77032Test
https://doi.org/10.1016/j.cap.2012.05.005Test -
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المؤلفون: Keisuke Nishitani, Kentaro Kawai, Mizuho Morita, Tatsuya Kawase, Junichi Uchikoshi, Kenta Arima, Atsushi Mura
المصدر: ECS Transactions. 41:171-178
مصطلحات موضوعية: Materials science, Oxide, Wet cleaning, Catalysis, Metal, Crystallography, chemistry.chemical_compound, Etch pit density, Chemical engineering, chemistry, Etching (microfabrication), visual_art, visual_art.visual_art_medium, Wafer, Thin film
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::32dd220bdd172304a1b5e99e95ac315dTest
https://doi.org/10.1149/1.3630841Test -
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المؤلفون: Kentaro Tsukamoto, Tatsuya Kawase, Shigeharu Goto, Noritaka Ajari, Takabumi Nagai, Mizuho Morita, Junichi Uchikoshi, Kenji Adachi
المصدر: ECS Transactions. 25:195-200
مصطلحات موضوعية: chemistry.chemical_classification, Thesaurus (information retrieval), Materials science, chemistry, Silicon, Chemical engineering, Etching (microfabrication), Salt (chemistry), chemistry.chemical_element
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::4c89f5bfbb1c138d8a24855a513b909dTest
https://doi.org/10.1149/1.3202653Test -
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المؤلفون: Mizuho Morita, Kentaro Kawai, Kentaro Tsukamoto, Kenta Arima, Masaki Otani, Takabumi Nagai, Kenji Adachi, Junichi Uchikoshi
المصدر: Japanese Journal of Applied Physics. 55:108003
مصطلحات موضوعية: Materials science, 020209 energy, Etching rate, Inorganic chemistry, General Engineering, General Physics and Astronomy, 02 engineering and technology, Activation energy, 021001 nanoscience & nanotechnology, Ion, Metal, Transition metal, Etching (microfabrication), visual_art, 0202 electrical engineering, electronic engineering, information engineering, visual_art.visual_art_medium, 0210 nano-technology
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::8592ff32be9ce2fa5647f6c66ab4cf7aTest
https://doi.org/10.7567/jjap.55.108003Test -
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المؤلفون: Kentaro Kawai, Takeshi Okamoto, Mizuho Morita, Atsushi Mura, Kenta Arima, Kazuto Yamauchi, Yasuhisa Sano, Tatsuya Kawase, Yusuke Saito
المصدر: ECS Meeting Abstracts. :1277-1277
مصطلحات موضوعية: Materials science, technology, industry, and agriculture, Oxide, engineering.material, Isotropic etching, Catalysis, Metal, chemistry.chemical_compound, Chemical engineering, chemistry, Etching (microfabrication), visual_art, visual_art.visual_art_medium, engineering, Molecule, Noble metal, Algorithm, Nanoscopic scale
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0524f8c326031d7efe47072c81af03ecTest
https://doi.org/10.1149/ma2016-02/12/1277Test -
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المؤلفون: Katsuya Dei, Mizuho Morita, Junichi Uchikoshi, Tatsuya Kawase, Atsushi Mura, Kentaro Kawai, Kenta Arima, Keisuke Nishitani
المصدر: Nanoscale Research Letters
مصطلحات موضوعية: Lithography, Materials science, Nano Express, Oxygen reduction, technology, industry, and agriculture, Oxide, Nanochemistry, Nanotechnology, Machining, Condensed Matter Physics, Isotropic etching, Dissolved oxygen, Atomic force microscopy, chemistry.chemical_compound, stomatognathic system, Materials Science(all), Resist, chemistry, Chemical engineering, Etching (microfabrication), Molecule, General Materials Science, Catalyst, Nanoscopic scale
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b37d012374f2953256bc1aaccdffe862Test
https://doi.org/10.1186/1556-276x-8-151Test