دورية أكاديمية
Continuum and Molecular Modeling of Chemical Vapor Deposition at Nano-Scale Fibrous Substrates
| العنوان: | Continuum and Molecular Modeling of Chemical Vapor Deposition at Nano-Scale Fibrous Substrates |
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| المؤلفون: | Himel Barua, Alex Povitsky |
| المصدر: | Mathematical and Computational Applications, Vol 28, Iss 6, p 112 (2023) |
| بيانات النشر: | MDPI AG, 2023. |
| سنة النشر: | 2023 |
| المجموعة: | LCC:Applied mathematics. Quantitative methods LCC:Mathematics LCC:Electronic computers. Computer science |
| مصطلحات موضوعية: | chemical vapor deposition, low-pressure reactor, direct simulation Monte Carlo, computational fluid dynamics, carbon deposition, Applied mathematics. Quantitative methods, T57-57.97, Mathematics, QA1-939, Electronic computers. Computer science, QA75.5-76.95 |
| الوصف: | Chemical vapor deposition (CVD) is a common industrial process that incorporates a complex combination of fluid flow, chemical reactions, and surface deposition. Understanding CVD processes requires rigorous and costly experimentation involving multiple spatial scales, from meters to nanometers. The numerical modeling of deposition over macro-scale substrates has been conducted in the literature and results show compliance with experimental data. For smaller-scale substrates, where the corresponding Knudsen number is larger than zero, continuum modeling does not provide accurate results, which calls for the implementation of molecular-level modeling techniques. In the current study, the finite-volume method (FVM) and Direct Simulation Monte Carlo (DSMC) method were combined to model the reactor-scale flow with CVD around micro- and nano-scale fibers. CVD at fibers with round cross-sections was modeled in the reactor, where fibers were oriented perpendicularly with respect to the feedstock gas flow. The DSMC method was applied to modeling flow around the matrix of nano-scale circular individual fibers. Results show that for smaller diameters of individual fibers with the same filling ratio, the residence time of gas particles inside the fibrous media reduces, and, consequently, the amount of material surface deposition decreases. The sticking coefficient on the fibers’ surface plays an important role; for instance, increasing the sticking coefficient from 20% to 80% will double the deposition rate. |
| نوع الوثيقة: | article |
| وصف الملف: | electronic resource |
| اللغة: | English |
| تدمد: | 2297-8747 1300-686X |
| العلاقة: | https://www.mdpi.com/2297-8747/28/6/112Test; https://doaj.org/toc/1300-686XTest; https://doaj.org/toc/2297-8747Test |
| DOI: | 10.3390/mca28060112 |
| الوصول الحر: | https://doaj.org/article/35e4971df0d141ee82401694d4e3aee2Test |
| رقم الانضمام: | edsdoj.35e4971df0d141ee82401694d4e3aee2 |
| قاعدة البيانات: | Directory of Open Access Journals |
| تدمد: | 22978747 1300686X |
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| DOI: | 10.3390/mca28060112 |