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المؤلفون: Boris Sviličić, Rebecca Cheung, Enrico Mastropaolo, Rui Zhang
المصدر: Sviličić, B, Mastropaolo, E, Zhang, R & Cheung, R 2015, ' Tunable MEMS cantilever resonators electrothermally actuated and piezoelectrically sensed ', Microelectronic Engineering, vol. 145, no. 0, pp. 38-42 . https://doi.org/10.1016/j.mee.2015.02.049Test
مصطلحات موضوعية: Microelectromechanical systems, MEMS resonator, Frequency response, Cantilever, Materials science, Piezoelectric sensor, business.industry, Tuning, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Electrothermal actuation, Resonator, Cantilever resonator, Q factor, Optoelectronics, Electrical and Electronic Engineering, cantilever resonator, piezoelectric sensing, electrothermal actuation, tuning, Actuator, business, Piezoelectric sensing, Voltage
وصف الملف: application/pdf
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2335ec8330e398f591702bdea8cdda6aTest
https://doi.org/10.1016/j.mee.2015.02.049Test -
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المؤلفون: Enrico Mastropaolo, Boris Sviličić, Rebecca Cheung, Graham S. Wood
المصدر: Cheung, R, Wood, G, Mastropaolo, E & Sviličić, B 2017, ' Tuning Performance of Silicon Carbide Micro-Resonators ', Materials Science Forum, vol. 897, pp. 601-605 . https://doi.org/10.4028/www.scientific.net/MSF.897.601Test
مصطلحات موضوعية: Materials science, Cantilever, 02 engineering and technology, 01 natural sciences, chemistry.chemical_compound, Resonator, 0103 physical sciences, Silicon carbide, Electronic engineering, General Materials Science, 010302 applied physics, business.industry, Mechanical Engineering, 021001 nanoscience & nanotechnology, Condensed Matter Physics, MEMS resonators, Electrothermal actuation, Piezoelectric sensing, Frequency tuning, Compressive strength, chemistry, Mechanics of Materials, Electrode, Optoelectronics, 0210 nano-technology, business, Sensitivity (electronics), Layer (electronics), Beam (structure)
وصف الملف: application/pdf
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a6802112a0bb5f143fbce6bf9b7feceaTest
https://doi.org/10.4028/www.scientific.net/msf.897.601Test -
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المؤلفون: Enrico Mastropaolo, I. Gual, Rebecca Cheung
المصدر: Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems. 223:87-97
مصطلحات موضوعية: Materials science, Cantilever, business.industry, Bimorph, chemistry.chemical_element, Resonance, Condensed Matter Physics, Resonator, chemistry.chemical_compound, chemistry, Aluminium, Electrode, Electronic engineering, Silicon carbide, Optoelectronics, General Materials Science, Electrical and Electronic Engineering, business, Voltage
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::2d3216ae636712a6df8f20e598ecab66Test
https://doi.org/10.1243/17403499jnn176Test -
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المؤلفون: Isaac Gual, Enrico Mastropaolo, Andrew Bunting, Rebecca Cheung, Graham S. Wood
المصدر: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 28:C6N18-C6N23
مصطلحات موضوعية: Cantilever, Materials science, business.industry, Process Chemistry and Technology, Feedthrough, Capacitance, Piezoelectricity, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Resonator, Electrode, Materials Chemistry, Optoelectronics, Output impedance, Electrical and Electronic Engineering, business, Instrumentation, Electrical impedance
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::569fb4f422a3ced813914c709c72b1c5Test
https://doi.org/10.1116/1.3498760Test -
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المؤلفون: Rebecca Cheung, I. Gual, Enrico Mastropaolo
المصدر: Electronics Letters. 46:62
مصطلحات موضوعية: Materials science, Cantilever, business.industry, Electrical engineering, Wide-bandgap semiconductor, Resonance, Bimorph, Natural frequency, Resonator, chemistry.chemical_compound, chemistry, Silicon carbide, Optoelectronics, Electrical and Electronic Engineering, business, DC bias
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::23b3f7d6ce713606e85ca610198f0204Test
https://doi.org/10.1049/el.2010.3051Test -
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المؤلفون: Sviličić, B., Enrico Mastropaolo, Cheung, R.
المصدر: ResearcherID
Scopus-Elsevierمصطلحات موضوعية: Silicon carbide, MEMS, resonator, cantilever, piezoelectric actuation, piezoelectric sensing, frequency tuning
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::32e0b51acfcfc968a78fbdc8b34d121fTest
http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000318180100004&KeyUID=WOS:000318180100004Test