المؤلفون: Kyung Won Lee, Jin Ku Lee, Jae Geun Oh, Tae Hoon Huh, Min Ae Ju, Seung Joon Jeon, Ja Chun Ku, Sung Ki Park, Kim, Steve, Dae Ho Yoon, Geum Joo Ra, Harris, Mark A., Reece, Ronald N.

المصدر: AIP Conference Proceedings; 11/3/2008, Vol. 1066 Issue 1, p505-508, 4p, 8 Black and White Photographs, 2 Diagrams, 2 Charts, 4 Graphs

مصطلحات موضوعية: ION implantation, DYNAMIC random access memory, ION bombardment, BORON, TRANSMISSION electron microscopy

المؤلفون: Tae-Hoon Huh, Byung-Jae Kang, Geum-Joo Ra, Kyung-Won Lee, Kim, Steve, Reece, Ronald N., Rubin, Leonard M., Ameen, Michael S., Won-Min Moon, Min-Sung Lee, Young-Ho Lee, Jong-Oh Lee, Dong-Chul Park, Jung-Youn Lim, Youn-Soo Kim, Jae-Sang Ro

المصدر: AIP Conference Proceedings; 11/3/2008, Vol. 1066 Issue 1, p87-90, 4p, 3 Charts, 6 Graphs

مصطلحات موضوعية: TRANSISTORS, BORON, SEMICONDUCTOR wafers, FLUORINE, TEMPERATURE, DIFFUSION

المؤلفون: Hwang, Sun-Hwan, Kim, D. S., Joo, Y. H., Oh, J. G., Lee, J. K., Jung, T. W., Cho, H. J., Sohn, Y. S., Sheen, D. S., Pyi, S. H., Kim, Steve, Huh, T. H., Krull, W. A., Cho, H. T.

المصدر: AIP Conference Proceedings; 2006, Vol. 866 Issue 1, p163-166, 4p, 2 Diagrams, 7 Graphs

مصطلحات موضوعية: ION implantation, CAPACITORS, FOCUSED ion beams, BORON, SECONDARY ion mass spectrometry, SILICON, HYDROGEN content of metals, THERMAL desorption