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1
المؤلفون: Kenta Arai, Masahiro Hirata, Hajime Yoshida, Hitoshi Akimichi
المصدر: Vacuum. 86:838-842
مصطلحات موضوعية: Leak, Residual gas analyzer, Free molecular flow, Chemistry, Ionization, Calibration, Analytical chemistry, Condensed Matter Physics, Mass spectrometry, Instrumentation, Quadrupole mass analyzer, Surfaces, Coatings and Films, Volumetric flow rate
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::7fbf6b5bc637d751b38b20487c0288bbTest
https://doi.org/10.1016/j.vacuum.2011.02.013Test -
2
المؤلفون: Hitoshi Akimichi, Masahiro Hirata, Hajime Yoshida
المصدر: Vacuum. 86:226-231
مصطلحات موضوعية: Chemistry, business.industry, Flow (psychology), Analytical chemistry, Linearity, Gauge (firearms), Condensed Matter Physics, Surfaces, Coatings and Films, Optics, Calibration, Range (statistics), Stage (hydrology), Standard uncertainty, business, Instrumentation
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::31b6f8e8278e5ed74b91215c35012fc7Test
https://doi.org/10.1016/j.vacuum.2011.06.012Test -
3
المؤلفون: Hitoshi Akimichi, Masahiro Hirata, Hajime Yoshida, Kenta Arai
المصدر: Vacuum. 85:78-83
مصطلحات موضوعية: Residual gas analyzer, Chemistry, Quadrupole, Analytical chemistry, Calibration, Ion current, Repeatability, Partial pressure, Condensed Matter Physics, Mass spectrometry, Instrumentation, Quadrupole mass analyzer, Surfaces, Coatings and Films
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::954e96640adafd560396fbf3d37eac80Test
https://doi.org/10.1016/j.vacuum.2010.04.005Test -
4
المؤلفون: Masahiro Hirata, Kenta Arai, Hitoshi Akimichi
المصدر: Journal of the Vacuum Society of Japan. 53:614-620
مصطلحات موضوعية: Chemistry, Capillary action, Analytical chemistry, Orifice plate, Surfaces and Interfaces, Flow measurement, Volumetric flow rate, Bellows, Volume (thermodynamics), Measurement uncertainty, General Materials Science, Constant (mathematics), Instrumentation, Spectroscopy
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::af3835bd233a5444cba84147641ee299Test
https://doi.org/10.3131/jvsj2.53.614Test -
5
المؤلفون: Masahiro Hirata, Hajime Yoshida, Hitoshi Akimichi, Eiich Komatsu, Kenta Arai
المصدر: Journal of the Vacuum Society of Japan. 53:686-691
مصطلحات موضوعية: Chemistry, Flow (psychology), Analytical chemistry, Surfaces and Interfaces, Mechanics, Capacitance, law.invention, Pressure measurement, Free molecular flow, law, Thermal transpiration, Calibration, General Materials Science, Vacuum chamber, Sensitivity (control systems), Instrumentation, Spectroscopy
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::abadac62f2024e1527af3c21908beb46Test
https://doi.org/10.3131/jvsj2.53.686Test -
6
المؤلفون: Hitoshi Akimichi, Masahiro Hirata, Hajime Yoshida, Kenta Arai
المصدر: Vacuum. 84:705-708
مصطلحات موضوعية: Chemistry, Ionization, Flow (psychology), Electrode, Analytical chemistry, Calibration, Repeatability, Gauge (firearms), Condensed Matter Physics, Instrumentation, Stability (probability), Sensitivity (electronics), Surfaces, Coatings and Films
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::ce918d8a9fd9ba60c2c83863cc6bb233Test
https://doi.org/10.1016/j.vacuum.2009.09.011Test -
7
المؤلفون: Tsuyoshi Otani, Masahiro Hirata
المصدر: Thin Solid Films. 442:44-47
مصطلحات موضوعية: Metals and Alloys, Analytical chemistry, Float glass, Surfaces and Interfaces, Substrate (electronics), Silane, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, chemistry.chemical_compound, Carbon film, chemistry, Silicon nitride, law, Plasma-enhanced chemical vapor deposition, Materials Chemistry, Deposition (phase transition), Thin film
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::4f857c23d801d4be849bc661fa939d65Test
https://doi.org/10.1016/s0040-6090Test(03)00938-6 -
8
المؤلفون: Masahiro Hirata, Shigemi Suginuma
المصدر: SHINKU. 45:745-748
مصطلحات موضوعية: Physics::Instrumentation and Detectors, Chemistry, Sensitivity coefficient, Analytical chemistry, Gauge (firearms), Condensed Matter Physics, Ion trajectory, Surfaces, Coatings and Films, Ion, Anode, Physics::Plasma Physics, Ion density, Electrode, Electrical and Electronic Engineering, Atomic physics
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::bdaf67ed63373cd15e622d892275d996Test
https://doi.org/10.3131/jvsj.45.745Test -
9
المؤلفون: Masahiro Hirata, Kzuya Saito, Kiyohide Kokubun, Yoshinao Ikeda, Sonoko Tsukahara, Shingo Ichimura
المصدر: Vacuum. 53:291-294
مصطلحات موضوعية: Materials science, Analytical chemistry, Polishing, chemistry.chemical_element, Electrolyte, engineering.material, Condensed Matter Physics, Surfaces, Coatings and Films, Outgassing, Coating, chemistry, engineering, Calibration, Test chamber, Vacuum chamber, Tin, Instrumentation
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::77e55ccca9182f7cb853bb71c2992abbTest
https://doi.org/10.1016/s0042-207xTest(98)00373-x -
10
المؤلفون: Satoshi Akimichi, Masahiro Hirata, Hajime Yoshida, Kenta Arai, Sakae Komatsu
المصدر: Shinku. 49:129-131
مصطلحات موضوعية: Leak, Field (physics), Chemistry, Capillary action, Dynamic range, Mass flow controller, Analytical chemistry, Mechanics, Gauge (firearms), Condensed Matter Physics, Stability (probability), Surfaces, Coatings and Films, Calibration, Electrical and Electronic Engineering
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::8156c00c042275aaac146312ad933ddbTest
https://doi.org/10.3131/jvsj.49.129Test