دورية
Effect of interrupting film growth on the properties of a-Si: H
العنوان: | Effect of interrupting film growth on the properties of a-Si: H |
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المؤلفون: | Shu-Lin, Wang, Ru-Guang, Cheng, Fritzsche, H. |
المصدر: | Philosophical Magazine Letters; April 1988, Vol. 57 Issue: 4 p241-245, 5p |
مستخلص: | This paper compares photbluminescence optical absorption, H-evolution, and infrared vibrational spectra of glow-discharge deposited hydrogenated amorphous silicon, a-Si:H, prepared in three different ways: continuous deposition and deposition interrupted hundreds of times either by a shutter or by shutting off the plasma power. The latter yields an excess hydrogen content, a blue shift of the optical gap, and a decrease in the photoluminescence intensity. The results are related to the initial non-equilibrium plasma chemistry. |
قاعدة البيانات: | Supplemental Index |
تدمد: | 09500839 13623036 |
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DOI: | 10.1080/09500838808214714 |